Accuracy analysis of plane-strain bulge test for determining mechanical properties of thin films  

平面应变鼓包实验测量薄膜力学性能的精度分析(英文)

作　　者：杨林[1,2] 龙士国[1,2] 马增胜[1,2] 王子菡[1,2] 

机构地区：[1]湘潭大学 低维材料及其应用技术教育部重点实验室,湘潭411105 [2]湘潭大学 材料科学与工程学院,湘潭411105

出　　处：《Transactions of Nonferrous Metals Society of China》2014年第10期3265-3273,共9页中国有色金属学报（英文版）

基　　金：Project(11172258)supported by the National Natural Science Foundation of China

摘　　要：The effect of a variety of geometrics, initial conditions and material properties on the deformation behavior of thin films in the plane-strain bulge test was systematically scrutinized by performing the finite element analysis, and then the accuracy of the plane-strain bulge test in determining the mechanical properties of thin films in terms of our finite element results was analyzed. The results indicate that although the determination of the plane-strain modulus in the light of the plane-strain bulge equation is fairly accurate, the calculation of the residual stress is not satisfied as expected, especially for low residual stress. Finally, an approach is proposed for analyzing bulge test data, which will improve the accuracy and reliability of this bulge test technique.采用有限元法系统地研究了平面应变鼓包实验中鼓包尺寸、薄膜初始条件以及材料参数对薄膜变形行为的影响。然后,根据有限元结果,分析平面应变鼓包实验测量薄膜力学性能的精度。结果表明:尽管原有的平面应变鼓包理论模型测量平面应变模量的精度很高,但是依其测量残余应力的精度并不高,尤其是在低残余应力阶段。最后,根据上述情况,提出一种新的分析鼓包实验数据的方法以提高平面应变鼓包技术的精度和可靠性。

关 键 词：thin films mechanical properties bulge test ACCURACY finite element analysis 

分 类 号：O484.4[理学—固体物理]