超精密光学磨床减小热误差的结构优化  

Material Thermal Conductivity Determination and Structure Optimization of Ultra-precision Optical Machine Tool

作　　者：焦瑶[1,2] 孙立剑[1,2] 洪海波[1,2] 殷跃红[1,2] 

机构地区：[1]上海交通大学机械系统与振动国家重点实验室,上海200240 [2]上海交通大学机器人研究所,上海200240

出　　处：《机械工程学报》2015年第1期167-175,共9页Journal of Mechanical Engineering

基　　金：国家重点基础研究发展计划资助项目(973计划;2011CB013203)

摘　　要：热变形是影响超精密机床精度的关键因素之一,而热导率是分析机床热变形准确度的决定性因素。为了保证机床温度场分布分析的准确性,提高机床的精度,提出一种基于热力学理论的热导率分析模型以及结合有限元分析的机床结构优化方法。建立自由电子气模型以及Debye模型,分别计算出自主设计的超精密光学磨床所采用的几种材料的热导率,提高热导率的准确性;进而利用有限元软件ANSYS分析机床主轴、溜板箱和床身的温度场分布;研究分析不同机床结构下主轴和机床整体的温升规律,提出基于热力学分析结果的一系列超精密光学磨床结构优化方法,针对误差敏感方向,采取对电动机与溜板箱的连接件以及电动机和主轴的接触件进行优化设计,减小热源与主轴、箱体之间的接触面积等方法,使机床热变形减小,提高了机床的精度。Thermal conductivity is the decisive factor in the accuracy analysis of thermal deformation, which is one of the key reasons affecting the precision of ultra-precision machine. In order to ensure the accuracy of temperature field distribution analysis and improve the machine precision, a thermal conductivity analysis model based on thermodynamic theory and a structure optimization method of machine tools through the finite element analysis are presented. To improve the analysis accuracy of the thermal conductivity, flee electron gas model and Debye model are applied to calculate the thermal conductivity of main materials of ultra-precision optical machine tools. The temperature field distribution of spindle, carriage and bed can be obtained through the finite element analysis software such as ANSYS. Based on the study of temperature rise law of the spindle and the complete machine, a structure optimization method of ultra-precision optical machine is finally presented in the error sensitive direction by reducing the contact area between the motor, spindle and carriage, optimizing the connections between the motor, spindle and carriage. As a result, the thermal deformation is reduced and the machine accuracy is improved.

关 键 词：热导率 超精密光学磨床 温度场分布 结构优化 

分 类 号：TG584[机械工程—精密仪器及机械]