循环氩离子轰击对磁控溅射铝膜结构和性能的影响  

Influences of Cycles Argon Ion Bombardment on Structure and Properties of Al Films Deposited by Magnetron Sputtering

作　　者：胡芳[1,2] 代明江[1,2] 林松盛[1,2] 侯惠君[1,2] 石倩[1,2] 赵利[1,2] 

机构地区：[1]广东省工业技术研究院(广州有色金属研究院)新材料研究所,广州510651 [2]广东省现代表面工程技术重点实验室,广州510651

出　　处：《中国表面工程》2015年第1期49-55,共7页China Surface Engineering

基　　金：国家科技支撑计划(2012BAE02B01)

摘　　要：为了提高烧结钕铁硼永磁材料的耐腐蚀性能,采用磁控溅射技术在钕铁硼表面制备了厚度约为14.0μm的铝膜,使用循环氩离子轰击铝膜的方法制备了3个周期的多层铝膜。利用扫描电子显微镜(SEM)观察铝膜的表面和截面形貌,X射线衍射仪(XRD)表征膜层的晶体结构,采用中性盐雾试验测试膜层的耐盐雾腐蚀性能,研究循环氩离子轰击对铝膜层形貌、结构及耐中性盐雾腐蚀性能的影响。结果表明:与相同厚度的单层铝膜相比,3个周期的多层铝膜晶粒均匀细小,膜层的柱状晶结构被打断,内部形成了两个明显的界面;膜层沿(111)晶面择优生长;与厚度相同的单层Al膜相比,3个周期的多层Al膜的耐蚀性显著提高,其耐中性盐雾腐蚀时间可达到312h。循环氩离子轰击铝膜的方法可以改善铝镀层的质量和耐盐雾腐蚀性能。In order to enhance the anti-corrosion performance of sintered NdFeB, A1 films with the thickness of about 14.0 μm were deposited on NdFeB magnets by magnetron sputtering technique. Three-period AI multilayer films were prepared by bombarding A1 filmsurface using argon ion. The surface and cross section morphologies of the A1 films were observed by scanning electron microscopy （SEM）, the structure of A1 films were characterized by X-ray diffraction instrument （XRD）, and the salt spray corrosion resistance was measured by neutral salt spray test. The influences of cyclic argon ion bombardment on the morphologies, structure and salt spray corrosion resistance of the A1 films were mainly studied. The results show that the grains of the A1 films after cycles argon ion bombardment are uniform and fine. The columnar crystal structure of the film is interrupted by argon ion bombardment, which can be formed into two distinct in- terfaces in the internal of aluminum films, a （111） plane preferred orientation is observed. The neutral salt spray （NSS） test revealed that three-period aluminum multilayers have much better corrosion resistance than the single aluminum layer with the same thickness. The anticorrosion time of neutral salt spray can reach to 312 h. The quality and anti-corrosion performance of the A1 films can be improved by the method of circulated argon ion bombardment.

关 键 词：钕铁硼 氩离子轰击 界面 耐腐蚀 

分 类 号：TG174.444[金属学及工艺—金属表面处理]