基于圆载频干涉图相位解调技术的点衍射干涉术  

Point Diffraction Interferometry Based on Phase Demodulation Technique for Circular Carrier Interferogram

作　　者：李金鹏[1] 陈磊[1] 朱文华[1] 胡芬[1] 

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学学报》2015年第1期144-152,共9页Acta Optica Sinica

基　　金：国家自然科学基金(61108041;U1231111)

摘　　要：为测量光学系统出射波前以及动态波前,提出一种基于圆载频干涉图相位解调技术的点衍射干涉术。在传统点衍射干涉仪中调整点衍射板轴向离焦量引入圆载频,通过二阶极坐标变换可以将圆载频干涉图转换为具有准线性载频特征的干涉图,从而在频域中将连续频谱转换为准离散谱,采用傅里叶变换法即可提取相位。仿真波面为利用36项Zernike多项式随机生成,在离焦17λ条件下相位恢复误差的均方根值为0.002λ。实验测量了F/10标准镜头岀射波面,测量结果与SID-4波前探测器一致;实验还实现了有机玻璃材料吸收特性的动态检测。因此采用该技术能够实现光学系统的检测以及动态波面实时测量。In order to mearsure emerging wavefront and dynamic wavefront of optical system, a point diffraction interferometry based on technique for demodulating circular carrier interferogram is proposed.Circular carrier is introduced in interferogram by shifting point diffraction plate in longitudinal direction in conventional point diffraction interferometer. The circular carrier interferogram is converted into quasi linear carrier interferogram after quadratic polar coordinate transforming, meanwhile the continuous spectrum is converted into quasi discrete spectrum in frequency domain. Fourier transform method is then applied to extract phase. Simulated wavefront is generated randomly based on 36 Zernike polynomials, and root mean square value of phase recovery error is 0.002 l on condition that defocus is 17 l. Testing the emerging wavefront of F/10 lens is realized by using this method and the result is in agreement with that obtained by SID- 4wavefront sensor; dynamic measuring of organic glass absorptive character is also realized. This method can be applied to test optical system and measure real-time wavefront.

关 键 词：测量 光学测量 点衍射干涉术 圆载频 相位解调 

分 类 号：O436[机械工程—光学工程]