二维虚光栅移相莫尔条纹相位提取算法  

Two-Dimensional Virtual Grating Phase Shifting Moiré Fringe Method of Phase Extraction

作　　者：陈晨[1] 刘克[1] 李艳秋[1] 汪海[1] 

机构地区：[1]北京理工大学光电学院光电成像技术与系统教育部重点实验室,北京100081

出　　处：《中国激光》2015年第2期245-252,共8页Chinese Journal of Lasers

基　　金：国家自然科学基金重点项目(60938003);国家科技重大专项;国家自然科学基金青年科学基金(61205164);北京高等学校青年英才计划;北京理工大学基础研究基金(20120442004)

摘　　要：目前二维干涉图所采用的相位提取算法大多以傅里叶变换法为主,而傅里叶变换法对噪声比较敏感。虚光栅移相莫尔条纹法具有较高的提取精度,而且抗噪性较好。在一维干涉图的基础上,提出了一种适用于二维干涉图相位提取的二维虚光栅移相莫尔条纹法,该方法通过构造一定相移量的二维虚光栅实现相位提取。与傅里叶变换法对比研究的仿真结果表明:对于同一幅二维干涉图,在干涉图不含噪声的情况下,傅里叶变换法与该方法的相对重构误差分别是5.52%和3.46%;在干涉图含噪声的情况下,随着噪声的增加,该方法在抗噪性方面的优势越来越明显。对二维横向剪切干涉仪零位校准装置所采集到的二维干涉图进行处理,实验结果表明,傅里叶变换法和该方法所得到的测量结果均方根值分别为0.0053λ和0.0037λ(λ=632.8 nm)。The most useful traditional technique to extract the phase information from a two-dimensional （2D） interferogram is fast fourier transformation （FFT）, which is proven to be sensitive to noise. The virtual grating phase shifting Moire fringe method has not only a good anti-noise characteristic but also a good extraction accuracy. Based on the research of processing the one-dimensional interferogram, a new two-dimensional virtual grating phase shifting Moire fringe method which can process the two-dimensional interferogram is proposed, which can extract the phase information by generating a 2D virtual grating containing special phase-shift amount. The simulation result between the FFT method and the new method shows that in the case of the interferogram without noise, the relative reconstruction error using the FFT method and the proposed method are 5.52% and 3.46%, respectively. However, the new method has an obvious advantages over the FFT method gradually while the noise increases. Processing the 2D interferogram obtained by the 2D lateral shearing interferometer null test system developed by our research group, the root mean square experiment results of the FFT method and the proposed method are 0.0053 λ and 0.0037λ （λ = 532.8 nm）, respectively.

关 键 词：测量 相位提取 莫尔条纹 二维干涉图 

分 类 号：O436.1[机械工程—光学工程]