ELECTRIC FIELD MICROSENSOR BASED ON THE STRUCTURE OF PIEZOELECTRIC INTERDIGITATED CANTILEVER BEAMS  

作　　者：Feng Ke Tong Jianhua Wang Yu Fang Dongming Xia Shanhong 

机构地区：[1]State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences [2]University of Chinese Academy of Sciences

出　　处：《Journal of Electronics(China)》2014年第6期497-504,共8页电子科学学刊（英文版）

摘　　要：This paper presents the design, fabrication, and preliminary experimental result of an electric field microsensor based on the structure of piezoelectric interdigitated cantilevers with staggered vertical vibration mode. The working principle of this electric field microsensor is demonstrated, and the induced charges and structural parameters of this microsensor are simulated by the finite element method. The electric field microsensor was fabricated by Micro-Electro Mechanical Systems(MEMS) technique. Each cantilever is a multilayer compound structure(Al/Si3N4/ Pt/PZT/Pt/ Ti/SiO 2/Si), and Piezoelectric, PieZ oelectric ceramic Transducer(PZT)(PbZ rxTi(1–x)O3) layer, prepared by sol-gel method, is used as the piezoelectric material to drive the cantilevers vibrating. This electric field microsensor was tested under the DC electric field with the field intensity from 0 to 5×104 V/m. The output voltage signal of the electric field microsensor has a good linear relationship to the intensity of applied electric field. The performance could be improved with the optimized design of structure, and reformative fabrication processes of PZT material.This paper presents the design, fabrication, and preliminary experimental result of an electric field microsensor based on the structure of piezoelectric interdigitated cantilevers with staggered vertical vibration mode. The working principle of this electric field microsensor is demonstrated, and the induced charges and structural parameters of this microsensor are simulated by the finite element method. The electric field microsensor was fabricated by Micro-Electro Mechanical Systems （MEMS） technique. Each cantilever is a multilayer compound structure （A1/Si3N4/ Pt/PZT/Pt/ Ti/SiO2/Si）, and Piezoelectric, PieZoelectric ceramic Transducer （PZT） （PbZrxTi（1-x）O3） layer, prepared by sol-gel method, is used as the piezoelectric material to drive the cantilevers vibrating. This electric field microsensor was tested under the DC electric field with the field intensity from 0 to 5 × 10^4 V/m. The output voltage signal of the electric field microsensor has a good linear relationship to the intensity of applied electric field. The performance could be improved with the optimized design of structure, and reformative fabrication processes of PZT material.

关 键 词：Micro-ElectroM echanical Systems(MEMS) Electric field microsensor PIEZOELECTRIC PieZ oelectric ceramic Transducer(PZT) driven 

分 类 号：O441.5[理学—电磁学]