A novel linear microprobe array for the fabrication of neural microelectrodes  

作　　者：ZHAO Shan Shan PEI Wei Hua ZHAO Hui WANG Yi Jun CHEN San Yuan CHEN Yuan Fang ZHANG He GUO Dong Mei GUI Qiang CHEN Hong Da 

机构地区：[1]State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences [2]Institute for Neural Computation, University of California San Diego

出　　处：《Science China(Technological Sciences)》2015年第2期346-351,共6页中国科学（技术科学英文版）

基　　金：supported the National Basic Research Program of China("973"Project)(Grant Nos.2011CB933203 and 2011CB933102);the National Hi-Tech Research and Development Program of China("863"Project)(Grant Nos.2012AA030308 and 2013AA032204);the National Natural Science Foundation of China(Grant Nos.61275200,61335010,61178051 and 61178082);the National Important Scientific Apparatus Developing Project(Grant No.2011YQ04008204)

摘　　要：A novel linear microprobe array(LMPA)has been developed by a conventional microfabrication method from silicon.The LMPA leverages the properties of conventional microwire with additional features of naturally formed regular spacing.With the help of periodic microprobe arrays and double-side V-grooves fabricated in advance between each pair of the two microprobes’rear ends,the number of microprobe units for assembly in one array can be flexibly chosen by cleavage fracture from the LMPA.The fabrication method was demonstrated and the prototype device was assessed by electrochemical impedance spectroscopy(EIS)and in vivo test.The SNR of the spikes recorded was 6.

关 键 词：LMPA regular spacing cleavage fracture V-groove 

分 类 号：R310[医药卫生—基础医学]