基于YCOB的高温声表面波谐振器的研究  

High Temperature SAW Resonator Based on YCOB Substrate

作　　者：曾义红[1] 舒琳[1] 邓森洋[1] 张万里[1] 彭斌[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《压电与声光》2015年第1期17-19,23,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61223002)

摘　　要：该文研究了在新型压电材料YCa4O(BO3)3(YCOB)上设计和制备高温声表面波(SAW)谐振器。研究了2种不同切型X-90°、Z-90°YCOB为基底的SAW谐振器的高温性能。研究表明,在600℃下器件的稳定性高,其谐振频率随着温度的升高呈线性降低。Z-90°YCOB器件的谐振频率和温度灵敏度分别为278.94 MHz和21.22kHz/℃;X-90°YCOB器件的谐振频率和温度灵敏度分别为230.53MHz和13.44kHz/℃。结果表明,Z-90°切型的YCOB的温度灵敏度较高。High temperature SAW resonator based on YCa4O（BO3）3 piezoelectric materials was designed and researched in this work.The characteristic of SAW resonator deposited on two type of YCa4O（BO3）3substrates with cutting type of X-90°and Z-90°was studied.Result showed that the SAW resonators had high stability up to600 ℃,the resonant frequency of the SAW resonators decreased linearly with the increasing of the temperature.The resonant frequency and the temperature sensitivity of the SAW resonator with Z-90° YCOB substrates were278.94 MHz and 21.22kHz/℃,respectively.The resonant frequency and the temperature sensitivity of the SAW resonator with X-90°YCOB substrates were 230.53 MHz and 13.44kHz/℃,respectively.The results suggested that the YCOB with Z-90°cutting had higher temperature sensitivity.

关 键 词：YCa4O(BO3)3 声表面波 高温谐振器 

分 类 号：TN65[电子电信—电路与系统] TN384