电可调非致冷红外探测原理  

Investigation of electrically tunable uncooled infrared detector

作　　者：张欢[1] 赖建军[1] 李宏伟[1] 李明燃 刘黎[1] 

机构地区：[1]华中科技大学武汉光电国家实验室,湖北武汉430074

出　　处：《红外与毫米波学报》2015年第1期74-79,共6页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金项目(61077078)~~

摘　　要：传统的红外光谱探测技术能够提供丰富的光谱信息,应用广泛,但该技术同时也存在一定局限性,如很难同步实现探测器小型化和探测波段实时调节等方面的要求.提出了一种基于电可调表面等离子体谐振吸收的新型FET红外探测器结构.基于电磁场理论分析了结构参数对红外光学吸收的影响,并通过结构参数的优化使吸收结构对特定红外波段的吸收率达到90%以上.栅压变化时VOx热敏层中载流子的浓度分布和折射率均发生变化,显示该器件具有明显的电可调光谱吸收特性.借助于这种FET结构,非制冷红外探测器将具有片上可调光谱探测能力,同时具有易于阵列化特点,为微小型可配置光谱成像探测器件提供了一条思路.Conventional infrared spectral imaging detection can provide large amount spectrum information and has extensive applications,but it cannot provide spectrum tunablility with compact volume. A novel FET detector structure with electrically tunable plasmon absorption was proposed. Through electromagnetic simulation of infrared absorption variation with the structure parameters,more than 90% absorption is reached within specified spectral band under optimized condition for this kind of detector. When gate voltage is changed,the carrier concentration and complex refractive index vary simultaneously,which lead to obvious characteristics of tunable absorption. Based on this FET structure,uncooled infrared detector will have the ability of spectral imaging on one single chip,which opens a newroute to miniaturization of spectral imaging systems.

关 键 词：非致冷红外探测器 等离子体谐振 电可调探测器 光谱成像探测 

分 类 号：TN215[电子电信—物理电子学]