高功率紫外超短激光脉冲光束质量研究  

Beam Quality Research of High Power Ultraviolet Ultrashort Laser Pulse System

作　　者：苏恒毅 兰小飞[1] 张骥[1] 王雷剑[1] 路建新[1] 汤秀章[1] 

机构地区：[1]中国原子能科学研究院核技术应用研究所,北京102413

出　　处：《原子能科学技术》2015年第2期230-233,共4页Atomic Energy Science and Technology

基　　金：973计划资助项目(2011CB808104)

摘　　要：通过搭建传输和聚焦光学系统,采用CCD相机测量了高功率紫外超短脉冲激光系统的光束质量参数,如紫外种子光及其经过KrF准分子激光器放大后的焦斑光强空间分布、焦斑尺寸及极限衍射倍数β。结果表明,紫外种子光光束质量良好,β接近于1。经放大后,光束质量劣化,β达到6左右。经分析,光学元件的表面缺陷可能是导致光束质量下降的主要因素。By means of building transmitting and focusing optical system,the beam quality of high power ultraviolet ultrashort laser pulse system was researched by using a CCD camera.Relevant parameters obtained from the measurement are the spatial intensity distribution,the size of focal spot and beam qualityβ-factor of the ultraviolet seed laser and the amplified pulse after its amplification by a KrF laser system.The result shows that the beam quality of the ultraviolet seed laser beam is good.β-factor is closed to 1.After amplification the beam quality worsens andβ-factor increases to about 6.Through analysis,surface defects of optical elements may be the major factor which leads to the degradation of the laser beam quality.

关 键 词：超短脉冲 KRF激光 光束质量评价 

分 类 号：TN24[电子电信—物理电子学]