硅基微结构上的聚吡咯功能薄膜均匀性研究  

Uniformity Research of Polypyrrole Composite Functional Films Based on Silicon Microstructures

作　　者：朱平[1,2] 蔡婷[1,2] 任重[1,2] 熊继军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2015年第2期89-92,122,共5页Micronanoelectronic Technology

基　　金：山西省自然基金资助项目(2012011010-2)

摘　　要：针对聚吡咯(PPy)功能薄膜在三维微结构上很难均匀电沉积,易出现MEMS超级电容器阴阳极黏连、接触等失效现象,通过控制吡咯(Py)单体与苯磺酸钠(BSNa)溶液的配比与循环伏安扫描速度,探索PPy功能薄膜在三维微结构上的均匀沉积方法。研究表明:当Py与BSNa摩尔比为1∶2,氧化石墨烯(GO)质量分数为0.4%时,以20 mV/s的扫描速度扫描56圈,制备出均匀致密的PPy功能薄膜。SEM测试表明:PPy功能薄膜具有良好的均匀性;恒流充放电测试表明:MEMS超级电容器具有良好的快速充放电特点。因此,本研究使三维硅基微结构上的功能薄膜均匀性得到明显改善,缓解了器件的阴阳极接触失效问题。To solve the issues that the polypyrrole（PPy）composite functional film is difficult to uniformly electrodeposite on a three-dimensional microstructure,prone to failure such as the connection of the anode and cathode,and the contact of the MEMS supercapacitor.The uniformly deposition method of the PPy composite functional film on a three-dimensional microstructure was investigated by controlling the ratio of the pyrrole（Py）monomer and benzene sulfonate（BSNa）and the scanning rate of cyclic voltammetry.The results show that when the mole ratio of Py to BSNa is 1∶2,the mass fraction of GO is 0.4%,a uniform dense PPy composite functional film can be obtained with the scanning rate of 20 mV/s to scan 56 laps.The SEM test result shows that the PPy composite functional film has a good uniformity,and the constant current chargedischarge test result shows that the MEMS supercapacitor has good rapid charge and discharge characteristics.Therefore,the uniformity of the composite functional film on the threedimensional microstructure is significantly improved through the research,and the contact failure phenomenon of the anode and cathode of the device is alleviated.

关 键 词：MEMS超级电容器 功能薄膜 聚吡咯(PPy) 苯磺酸钠(BSNa) 扫描速度 均匀性 

分 类 号：TH703[机械工程—仪器科学与技术]