高精度陶瓷镀金极杆的制造技术  

The Manufacturing Technology of High Precision Ceramic Gilt Pole

作　　者：刘兴宝[1] 吴志勇[1] 赵午云[1] 王宝瑞[1] 

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621999

出　　处：《机械设计与制造》2015年第2期104-107,共4页Machinery Design & Manufacture

基　　金：国家重大科学仪器设备开发专项(2011YQ130043)

摘　　要：陶瓷镀金极杆是高端四极质量分析器的核心零件,其精度与表面质量要求高,制造难度大,目前国内尚无研制报道.提出了一种陶瓷镀金极杆的精密制造工艺方法,采用“陶瓷基体精密磨削-化学镀镍磷合金-金刚石超精密切削镍磷合金层-电镀金”的工艺路线,攻克了陶瓷基杆上化学镀镍磷合金及镍磷合金层的金刚石超精密切削两项关键工艺,成功制造出了高精度镀金极杆（（φ）p12mm×150mm规格）,其整杆圆度（0.1～0.4）μm,圆柱度小于1μm,表面粗糙度Ra小于0.02μm,完全满足高精度四极质量分析器对极杆的制造精度要求.采用制造的陶瓷镀金极杆,研制出了国内首套高精度陶瓷镀金四极质量分析器,经检测其综合几何精度达到了2.25μm.Ceramic gilt pole is the critical component in high level quadrupole mass filter. It is very hard to manufacture because of its high accuracy and surface quality. Therefore, there is no related domestic report until now. A method to manufacture precision ceramic gilt pole is introduced. The process has four main steps which are precision grinding to ceramic, electroless plating of Ni-P alloy, ultra-precision diamond cutting to Ni-P alloy and electroplating of gold. Two key processes have been solved which are electroless plating of Ni-P alloy on ceramic and ultra-precision diamond cutting to Ni-P alloy. And high precision Gilt Poles （φ12mm×150mm） are produced successfully with roundness of fuU pole （0.1-0.4）μm, cylindricity less than 1 μm, and surface roughness less than Ra0.021μm. The ceramic gilt poles have been used to manufacture the first domestic high precision ceramic gilt quadrupole mass filter. The synthetic geometric accuracy achieved 2.251μm by test.

关 键 词：四极质量分析器 镀金极杆 镍磷合金 金刚石切削 

分 类 号：TH16[机械工程—机械制造及自动化] TH832.42