中红外平面光栅光谱仪系统光学设计与优化  

Optical design and optimization of a mid-infrared plane grating spectrometer system

作　　者：刘洋[1,2] 方勇华[1] 李大成[1] 李扬裕[1,2] 

机构地区：[1]中国科学院安徽光学精密机械研究所,安徽合肥230031 [2]中国科学院大学,北京100049

出　　处：《红外与激光工程》2015年第2期413-418,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金(41175037)

摘　　要：利用红外热电堆阵列探测器作为光接收器,以小型化且能满足一定光谱工作范围和光谱分辨率为设计指标,根据光谱仪器设计理论和像差理论,设计了一种Czerny-Turner结构中红外平面光栅光谱仪。系统采用双离轴抛物面镜作为前置光路缩减了光学系统尺寸,采用超环面聚焦镜校正了像散。运用ZEMAX设计软件对中红外平面光栅光谱仪的前置光路、色散成像系统进行设计、优化和分析。最终分析结果表明,该系统光谱工作范围为8.04~13.96μm,光谱分辨率优于80 nm,F数为2,光学结构特征尺寸约为150 mm×200 mm×70 mm,满足设计指标。Using the infrared thermopile array in the system as light receiver, with miniaturization and meet the requirements of certain spectral working range and spectral resolution as the system design task,according to the theory of spectrometer and the aberration, a mid-infrared plane grating spectrometer based on the structure of Czerny-Turner was designed. A double off-axis parabolic reflector was used as the fore-optical system to reduce the size of other optical elements, the toroidal focusing mirror was adopted to correct astigmatism. The ZEMAX software was applied to design, optimize and analyze the fore-optical system, imaging system of the spectrometer. Final analysis results show that the spectrometer system working range from 8.04 μm to 13.96 μm, spectral resolution is better than 80 nm, F number is2, optical size of the system is 150 mm×200 mm×70 mm, and satisfy the design task.

关 键 词：光学设计 光栅光谱仪 Czerny-Turner结构 双离轴抛物镜 超环面聚焦镜 

分 类 号：TP702[自动化与计算机技术—检测技术与自动化装置]