Na-Mg共掺杂ZnO薄膜的溶胶凝胶法制备及性能研究  

The Properties of Na-Mg Co-doped ZnO thin Films Prepared by Sol-Gel Method

作　　者：刘细妹[1] 胡跃辉[1] 陈义川[1] 马德福[1] 徐斌[1] 张志明[1] 

机构地区：[1]景德镇陶瓷学院机械电子工程学院,江西景德镇333403

出　　处：《陶瓷学报》2014年第3期287-290,共4页Journal of Ceramics

基　　金：江西省科技支撑计划资助项目(编号:2010BGA01100);江西省对外合作资助项目(编号:20111BDH80031;20132BDH80025);江西省自然基金资助项目(编号:20111BAB202005;20132BAB202001);江西省主要学科学术和技术带头人培养计划项目(编号:20123BCB22002);江西省高等学校科技落地计划(KJLD12085);江西省教育厅科技资助项目(编号:GJJ12494;GJJ13643;GJJ13625)

摘　　要：在石英玻璃衬底上,利用溶胶-凝胶法制备了Na-Mg共掺的ZnO薄膜,研究改变Na掺杂量对ZnO薄膜的微观结构、表面形貌和光学性能的影响。样品采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、紫外—可见光分光光度计UV-VIS进行了表征。结果表明:随着Na掺杂增加,ZnO薄膜的结晶度提高,有利于(002)晶面择优生长,其中Na-Mg掺杂比为1:1时效果最佳,表面更平整,颗粒生长更致密,薄膜的透过率达88%,带隙宽度3.31 eV。The Na-Mg co-doped ZnO thin films were prepared by sol-gel method on the quartz glass with fixed Mg content and changing Na content. The microstructure, surface topography and optical property of ZnO thin films were characterized by X-ray diffraction（XRD）,scanning electron microscope（SEM）, UV-Visible spectrophotometer. The results indicated that the crystallinities of the films were improved with the increasing of Na content, which is beneficial to the preferred orientation of（002） crystal face; when the Na-Mg content was 1：1,the surfaces of the films were smoother, the particles were more compact, and the transmittance of thin film was about 88%, the forbidden bandwidth was 3.31 ev.

关 键 词：溶胶-凝胶法 共掺杂 ZNO薄膜 微观结构 表面形貌 光学性能 

分 类 号：TQ174.75[化学工程—陶瓷工业]