基于ASTM方法的光学平面面形检测  

Measurement on optical plane surface based on ASTM method

作　　者：李晋惠[1] 王飞[1,2] 范博洋 

机构地区：[1]西安工业大学理学院,陕西西安710021 [2]西安工业大学北方信息工程学院,陕西西安710025 [3]西北工业大学自动化学院,陕西西安710072

出　　处：《光学仪器》2015年第1期4-8,共5页Optical Instruments

摘　　要：为分析光学平面面形偏差,以直径100mm光学平晶为检测对象,利用斐索干涉仪采集了被测光学平面的波面干涉图,按照美国材料与试验协会(American Society for Testing and Materials,ASTM)标准方法,通过分析,能够定性反映出被测光学平面的面形偏差。计算并分析了波面偏差指标峰谷值PV和均方根值RMS,将计算结果与利用ZYGO斐索干涉仪测得的数据对比,偏差为10-3λ,符合光学检测要求。综合考虑可操作性和计算精度,这种基于ASTM的方法是一种行之有效的光学检测分析方法。In order to obtain the optical plane surface error,firstly interference fringes of optical plane were collected through Fizeau interferometer on a 100 mm optical flat.Then,according to American Society for Testing and Materials(ASTM)standard method,the optical plane surface was tested by analysis of the interference fringes with horizontal method and longitudinal method.The result tells the optical plane surface error qualitatively and intuitively.Finally,the values of the RMSand PV were calculated,and compared with the data collected by ZYGO interferometer.The difference between them is 10-3λapproximately.The result satisfies the requirement of optical testing.Thus,ASTM method is the effective choice if operability and precision are comprehensively considered.

关 键 词：斐索干涉仪 干涉图 平面面形检测 ASTM方法 

分 类 号：TN247[电子电信—物理电子学]