Characteristics of Low Power CH_4/Air Atmospheric Pressure Plasma Jet  

作　　者：张军 肖德志 方世东 舒兴胜 左潇 程诚 孟月东 王守国 

机构地区：[1]Institute of Plasma Physics,Chinese Academy of Sciences

出　　处：《Plasma Science and Technology》2015年第3期202-208,共7页等离子体科学和技术（英文版）

摘　　要：A low power atmospheric pressure plasma jet driven by a 24 kHz AC power source and operated with a CH4/air gas mixture has been investigated by optical emission spectrometer. The plasma parameters including the electron excitation temperature, vibrational temperature and rotational temperature of the plasma jet at different discharge powers are diagnosed based on the assumption that the kinetic energy of the species obeys the Boltzmann distribution. The electron density at different power is also investigated by HS Stark broadening. The results show that the plasma source works under non-equilibrium conditions. It is also found that the vibrational temperature and rotational temperat;ure increase with discharge power, whereas the electron excitation temperature seems to have a downward trend. The electron density increases from 0.8×10^21 m^-3 to 1.1×10^21 m^-3 when the discharge power increases from 53 W to 94 W.A low power atmospheric pressure plasma jet driven by a 24 kHz AC power source and operated with a CH4/air gas mixture has been investigated by optical emission spectrometer. The plasma parameters including the electron excitation temperature, vibrational temperature and rotational temperature of the plasma jet at different discharge powers are diagnosed based on the assumption that the kinetic energy of the species obeys the Boltzmann distribution. The electron density at different power is also investigated by HS Stark broadening. The results show that the plasma source works under non-equilibrium conditions. It is also found that the vibrational temperature and rotational temperat;ure increase with discharge power, whereas the electron excitation temperature seems to have a downward trend. The electron density increases from 0.8×10^21 m^-3 to 1.1×10^21 m^-3 when the discharge power increases from 53 W to 94 W.

关 键 词：atmospheric pressure plasma jet optical emission spectroscopy rotational temperature vibrational temperature excitation temperature electron density 

分 类 号：O53[理学—等离子体物理] TE665.3[理学—物理]