双等离子体离子源的工作特性  

Operating characteristics of duoplasmatron ion source

作　　者：邱春玲[1] 曾小辉[1] 龙涛[2] 包泽民[1] 王培智[1] 

机构地区：[1]吉林大学仪器科学与电气工程学院,长春130022 [2]中国地质科学院地质研究所,北京100037

出　　处：《吉林大学学报（工学版）》2015年第1期161-166,共6页Journal of Jilin University:Engineering and Technology Edition

基　　金：国家重大科学仪器设备开发专项项目(2011YQ050069;2011YQ05006902)

摘　　要：针对双等离子体离子源受气压、磁场强度和放电电流影响,产生的O-离子束亮度不稳定的问题,设计并搭建了一套用于测试离子束亮度的离子光学系统,以SHRIMP II上的双等离子体离子源为对象,通过实验和仿真模拟分别研究了气压、磁场强度和放电电流对O-离子束亮度的影响规律。结果表明：该离子源能够稳定地工作在放电电流大于50 m A,气压为110~170 m Torr（1Torr=133.322 Pa）的条件下;当气压为140 m Torr、放电电流为200 m A、磁场强度为0.25 T时,获得的O-离子束亮度能够达到52.4 A/（cm2·sr）。合理控制离子源工作参数,可以增大O-离子束亮度,提高二次离子质谱的横向分辨率和灵敏度。The stability of brightness of the O beam generated from the douplasmatron ion source is influenced by the gas pressure, the magnetic field strength and the arc current. An ion optical system for measuring the brightness of a duoplasmatron of the SRHIMP II was presented. The brightness of the O- beams as a function of the gas pressure, the magnetic field strength and the arc current was experimentally studied. The results show that longtime, stable operation of the ion source can be realized at the pressure range from 110 mTorr to 170 reTort and an arc current above 50 mA. The maximum brightness measurements give 52. 4 A/（cm2 ~ sr） for O- with 0. 25 T magnetic field strength, a low pressure of 140mTorr ere and an arc current of 200 mA. Controlling these parameters reasonably can increase the brightness of O-, improve the lateral resolution and the sensitivity of the secondary ion mass spectrometry.

关 键 词：仪器仪表技术 二次离子质谱 双等离子体离子源 离子光学系统 离子束亮度 

分 类 号：TB773[一般工业技术—真空技术]