基于三维缺陷检测的DMD数字条纹投影光学系统设计  

Optical System Design of DMD Digital Fringe Projection Based on the Application of 3-D Defect Inspections

作　　者：陈方涵[1,2] 赵光宇[3] 蒋仕龙[2] 彭文达[1] 

机构地区：[1]深圳大学光电工程学院光电子器件与系统(教育部/广东省)重点实验室,广东深圳518060 [2]北京大学深圳研究院运动控制技术实验室,广东深圳518057 [3]华南师范大学华南先进光电子研究院光及电磁波研究中心,广州510006

出　　处：《光子学报》2015年第2期163-169,共7页Acta Photonica Sinica

基　　金：广东省引进创新科研团队计划(No.201001D0104799318)资助

摘　　要：基于半导体行业中PCB焊膏印刷检测的实际应用,采用0.45 WXGA DMD芯片设计了数字条纹投影光学系统.以LED作为光源,结合透镜阵列照明DMD芯片;同时,为了减小投影三角关系造成的条纹周期不均匀性对检测结果的影响,采用双远心光路结构将DMD生成的条纹成像到待测表面,且适用的最小检测面积为1mm2.光学模拟结果表明,该数字投影系统在被投影表面上的照明均匀性为91%,投射条纹的对比度高于0.8,且条纹周期均匀,为实际应用与后续条纹分析提供了良好保障.According to the practical solder paste printing inspection of PCB,digital fringe projector design used 0.45 WXGA DMD chip was performed in this paper.The design adopted LED as light source,and combined with lens array for evenness illumination.In order to reduce the influence of nonuniform fringe on inspection results caused by triangular relationship of projection,double telecentric optical configuration was used for imaging DMD-generating fringe on defected surface.The minimal inspection area of projector can reach 1mm^2.Simulation results show that illumination evenness of the digital fringe projector on defected surface is about 91%,contrast of projection fringe is better than 0.8,and keep the fringe pitch uniform.Optical projector designed in this paper provides guarantee for inspection application and following fringe analysis.

关 键 词：光学投影 表面缺陷 LED照明 数字条纹投影 数字微镜元件 双远心结构 

分 类 号：O439[机械工程—光学工程] TN307[理学—光学]