灵敏度可调的光学读出非制冷热像元设计  

Design of optical-readout uncooled thermal imaging pixel with adjustable sensitivity

作　　者：周玉修[1] 程融[1] 刘坚强[1] 曾玮[1] 孙光厚[1] 李铁[2] 

机构地区：[1]九江学院理学院,江西九江332005 [2]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050

出　　处：《激光与红外》2015年第2期158-162,共5页Laser & Infrared

基　　金：国家自然科学基金(No.11264021);江西省青年科学基金(No.20132BAB216011);九江学院科研项目(No.2013KJ16)资助

摘　　要：设计了一种可见光反射型光学读出非制冷热像元结构。理论分析表明热像元的热-机械灵敏度达到0.043deg·K-1,在热像元面积比已有报道减小75%的情况下,热-机械灵敏度反而提高至少79%。通过改变弯折梁底层金膜的面积来调节热像元的灵敏度,使其可在2.36×10-6rad·m2·W-1和9.21×10-6rad·m2·W-1之间变化。ANSYS仿真结果和理论结果吻合较好,验证了设计的正确性。A design of optical readout uncooled thermal imaging pixel is proposed. The theoretical analysis shows that,thermal-mechanical sensitivity reaches 0. 043deg·K^- 1and increases by 79% at least when the pixel size decreased by 75% compared with reported ones. Sensitivity can be adjusted from 2. 36 × 10^- 6rad · m^2· W^- 1to9. 21 × 10^- 6rad·m^2·W- 1by changing the size of the bottom gold layer on the folded cantilever. Finite element simulations by ANSYS are in good agreement with theoretical results,which verifies the validity of the design.

关 键 词：成像系统 非制冷红外热像元 光学读出 灵敏度 响应时间 

分 类 号：TN215[电子电信—物理电子学]