透射波前测量中寄生条纹的产生原理及移除方法  

Cause and remove method of spurious fringes in measuring transmit wavefront

作　　者：郑芳兰[1] 刘勇[1] 刘旭[1] 马可[1] 冯晓璇[1] 马玉荣[1] 任寰[1] 杨一[1] 姜宏振[1] 原泉[1] 石振东[1] 马骅[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《光学技术》2014年第6期543-546,共4页Optical Technique

摘　　要：在平行平板类元件透射波前的测量过程中,在干涉强度图上有时会产生寄生条纹,会给透射波前的测量引入较大的误差。阐述了寄生条纹的产生机理,仿真分析了寄生条纹对透射波前测量误差的影响,介绍了调节移除寄生条纹的方法。对一平板类透射元件进行了实验对比,分别测量了在具有寄生条纹时和移除寄生条纹后的透射波前。根据对比结果可以看出,该调节方法能有效地消除寄生条纹对透射波前测量的影响,使测量结果能更真实地反应出元件透射波前的分布。When measuring transmit wavefront of parallel plate,sometimes there are spurious fringes in the interferogram which can introduce error into the measurement result.The cause of spurious fringes is analyzed,and the effect to transmit wavefront error is emulated.The adjust method to remove spurious fringes is introduced.The transmit wavefront before and after remove spurious fringes is measured respectively on a parallel plate.By comparing the results,this method can reduce the affect of spurious fringes availability and make the measuring result more truthful.

关 键 词：光学测量 透射波前 寄生条纹 干涉 

分 类 号：O436[机械工程—光学工程]