粉末特性和加工工艺参数对钼板组织和性能影响的研究  

Influence of Powder Characteristics and Processing Parameters on Microstructure and Properties of Molybdenum Plate

作　　者：傅崇伟[1] 魏修宇[1,2] 

机构地区：[1]株洲硬质合金集团有限公司,湖南株洲412000 [2]硬质合金国家重点实验室,湖南株洲412000

出　　处：《硬质合金》2014年第6期347-352,共6页Cemented Carbides

基　　金：湖南省自然科学基金株洲市联合基金重点项目(13JJ8024)

摘　　要：工业纯钼板材被广泛用作LCD行业的溅射靶材,原始粉末特性和加工工艺参数对钼板的组织和性能有着很大的影响。本文采用三种不同粒度的钼粉,设置了不同的等静压制及轧制工艺,制备出钼板及相应试样,并采用扫描电镜、金相观察及硬度、密度测试等手段对各样品组织和性能进行了表征。研究结果表明:采用3.3μm中等粒度且粒度分布均匀的钼粉可制备出密度更高且晶粒更细的烧结钼板坯;采用160 MPa保压10 min并分级卸压的等静压工艺可制备出整体密度更高的烧结板坯,但并不能减小烧结板坯的内外密度差;减小轧制火次有助于得到细小晶粒组织,采用一火多道轧制工艺制备得到的钼板在退火后平均晶粒大小为30μm。Technically pure molybdenum plates are widely used as sputtering targets for LCD industry. The initial raw material characteristics and processing parameters have great influence on microstructure and properties of molybdenum plates. In this paper, the molybdenum plates and corresponding samples were prepared by using three types of molybdenum powders with different particle sizes and different isostatic pressing process and hot rolling process. The microstructure and properties of the samples were studied by SEM, metallographic observation, hardness test and density test. The results show that using molybdenum powder with medium particle size and uniform size distribution as raw materials, sintered molybdenum plate with higher density and finer grain size can be produced. The sintered sample prepared by isostatic pressing at 160 MPa for 10 min and gradual pressure relief has higher density, but the density difference between the inner and outer part of the sintered sample is not reduced. Reducing heating times during hot rolling helps to obtain fine grain structure. The average grain size of the molybdenum plate prepared by one heating and multi-pass rolling process is about 30μm.

关 键 词：粉末特性 等静压 热轧 

分 类 号：TF124[冶金工程—粉末冶金] TG146.412[冶金工程—冶金物理化学]