Quantitative Moisture Measurement with a Cavity Ring-down Spectrometer using Telecom Diode Lasers  

基于半导体激光的光腔衰荡光谱装置测定水汽含量

作　　者：陈兵[1] 康鹏[1] 李建英[2] 贺晓雷[2] 刘安雯[1] 胡水明[1] 

机构地区：[1]中国科学技术大学合肥微尺度物质科学国家实验室筹,合肥230026 [2]中国气象局大气探测中心,北京100081

出　　处：《Chinese Journal of Chemical Physics》2015年第1期6-10,I0001,共6页化学物理学报（英文）

基　　金：This work was supported by the National Basic Research Program of China （No.2013BAK12B00 and No.2013CB834602） and the National Natural Science Foundation of China （No.21225314 and No.21427804）.

摘　　要：Moisture measurement is of great needs in semiconductor industry, combustion diagnosis, meteorology, and atmospheric studies. We present an optical hygrometer based on cavity ring-down spectroscopy （CRDS）. By using different absorption lines of H20 in the 1.56 and 1.36 gm regions, we are able to determine the relative concentration （mole fraction） of water vapor from a few percent down to the 10-12 level. The quantitative accuracy is examined by comparing the CRDS hygrometer with a commercial chilled-mirror dew-point meter. The high sensitivity of the CRDS instrument allows a water detection limit of 8 pptv.

关 键 词：Cavity ring down spectroscopy MOISTURE Trace detection Diode laser 

分 类 号：O[理学]