长脉冲激光损伤YAG晶体的研究  

Analysis of YAG Crystal Damage Induced by Long Pulse Laser

作　　者：李长青[1] 王树成[1] 周玉锋[2] 张明福[2] 高丽敏[1] 

机构地区：[1]黑龙江科技大学材料科学与工程学院,黑龙江哈尔滨150027 [2]哈尔滨工业大学复合材料与结构研究所.黑龙江哈尔滨150001

出　　处：《山东科技大学学报（自然科学版）》2015年第1期74-79,共6页Journal of Shandong University of Science and Technology(Natural Science)

基　　金：黑龙江省教育厅科学技术研究项目(12531586);黑龙江省高等教育教学改革项目(GJZ201301060);黑龙江科技大学教学研究项目(JY13-90)

摘　　要：采用毫秒Nd∶YAG脉冲激光在不同的保护气体作用下对钇铝石榴石(yttrium aluminum garnet,YAG)晶面单脉冲损伤及多脉冲切割进行了研究,激光损伤及切割断口形貌采用SEM进行表征。结果表明:单脉冲TEM00模式Nd∶YAG激光对YAG晶体损伤时,表面能够生成锥形烧蚀坑(钥匙孔),且烧蚀坑的熔融层约几个微米;毫秒多脉冲Nd∶YAG激光在Ar,N2,O2保护下切割YAG单晶体,切割深度与保护气第一电离能相关。切割状态下,断口出现爆沸现象,产生的气泡形貌与保护气氛有关。Single pulse damage and multi-pulse cutting yttrium aluminum garnet （YAG） by millisecond Nd ： YAG pulse laser were investigated. Morphology of laser damage and cutting fracture were characterized by scanning elec- tronic microscope （SEM）. The result shows that ablation hole （keyhole） is formed by single pulse TEM00 mode Nd ： YAG laser,and the thickness of molten layer of ablation hole is about several micrometers; cutting depth of YAG single crystal is related with the first ionic energy of shielding gas and micro-morphologies of their cutting frac tures differ prominent under Ar,N2·O2 by multi pulse ms Nd ： YAG laser. In cutting condition, explosive boiling takes place within cutting kerr,and the morphologies of bubbles changes with shielding gas atmosphere.

关 键 词：钇铝石榴石 激光切割 保护气 爆沸 

分 类 号：TB332[一般工业技术—材料科学与工程]