Ar-CdCl_2热处理和稀土Nd掺杂对CdS/CdTe复合薄膜结构及其光学性能的影响  

Synthesis and Characterization of Nd-Doped CdS/CdTe Coatings

作　　者：李忠贤[1,2] 王呼生[3] 邹凯[4,2] 薛康[1] 张海霞[1] 鲍秀珍[1] 何佳[1] 周涛[1] 

机构地区：[1]内蒙古医科大学物理教研室,呼和浩特010021 [2]内蒙古自治区高等学校半导体光伏技术重点实验室,呼和浩特010021 [3]内蒙古医科大学计算机信息学院,呼和浩特010021 [4]内蒙古大学物理科学与技术学院,呼和浩特010021

出　　处：《真空科学与技术学报》2015年第3期271-275,共5页Chinese Journal of Vacuum Science and Technology

基　　金：内蒙古自治区重大基础研究开放课题(20130902);内蒙古医科大学青年创新基金(YKD2014QNCX001)

摘　　要：在TCO玻璃衬底上依次采用化学水浴法和真空热蒸发工艺沉积CdS、CdTe薄膜,并在不同条件下进行热处理,制备了CdS/CdTe异质结复合薄膜。通过X射线衍射、扫描电镜,紫外-可见(U-V)透射光谱研究了不同温度下稀土Nd掺杂以及Ar-CdCl2热处理对薄膜结构、形貌和光学性能的影响。结果表明:不同条件下制备的薄膜均具有(111)晶面择优取向;样品表面形貌在不同条件下热处理后存在剧烈的差异,随着热处理温度的升高,薄膜晶粒增大;掺入Nd并在Ar-CdCl2氛围下热处理后,薄膜致密且粒径均匀,粒径明显增大,其(111)晶面的择优取向进一步增强。U-V透射光谱分析表明,Ar气氛下热处理对改善薄膜的光吸收作用并不明显,但掺Nd和在Ar-CdCl2氛围下热处理均可明显增强薄膜的光吸收性能,这对于提高太阳电池的光谱响应是非常有利的。The Nd-doped CdS/CdTe hetero-junction was fabricated by vacuum evaporation of CdTe coatings on the TCO glass substrate pre-coated with CdS layers grown in chemical bath deposition （CBD）. The effects of the fabrication conditions, particularly the Nd-doping and annealing of CdTe in atmospheric argon and Ar-CdCl_2, on the microstructures and optical properties of the Nd-doped CdS/CdTe composite coatings were characterized with X-ray diffraction,scanning electron microscopy,and ultraviolet visible spectroscopy. The results show that the Nd-doping and annealing environment significantly affect its microstructures and absorption coefficient in near-infrared range. For example, as the annealing temperature in- creased, the （111） preferentially oriented grains became larger. When it comes to enhancement of absorption coefficient of the Nd-doped CdS/CdTe, annealing in Ar-CdCl_2 outperforms annealing in Ar. We suggest that the Nd-doped CdS/CdTe coatings, annealed in Ar-CdCl_2,may significantly improve spectral response and carrier collection of solar cells.

关 键 词：CdS/CdTe 热处理 ND掺杂 光学性能 

分 类 号：O484[理学—固体物理] TM914.4[理学—物理]