MEMS微镜的系统级设计与分析  

System-level Design and Analysis of MEMS Optical Switch

作　　者：王锁成[1] 郝永平[1] 刘双杰[1] 

机构地区：[1]沈阳理工大学

出　　处：《工具技术》2015年第3期76-78,共3页Tool Engineering

摘　　要：提出一种基于空间转换原理、静电控制的MEMS光学开关。运用Coventor Ware软件中的Architect模块对MEMS光学开关进行系统级建模与仿真分析。分别对MEMS光开关施加半正弦、脉冲和阶跃三种不同的冲击信号,得到微镜转动的角位移与时间的关系曲线,分析得出微镜具有抵抗1500g冲击的能力。对微镜进行交流小信号分析,得出固有频率为28.48k Hz,与模态分析结果相比较,得出系统级和有限元两种分析方法的误差仅为0.6%,由此表明系统级仿真具有精度高、速度快的优势。A kind of Micro - electromechanical system optical switch based on the principle of spatial transformation with electrostatic control is put forward. By using the Architect module of Coventorware software the system - level model of MEMS optical switch is established and simulated to analyze. Applying three different impact signals of half sine, pulse and step to the MEMS optical switch, the corresponding relation of micro mirror rotation angle displacement and time is got- ten. The analysis shows that the micro mirror has the ability to resist the impact of 1500g. Making AC small signal analy- sis, the natural frequency is 28.48kHz. Comparing the result of modal analysis, the errors of the two methods is only 0.6% which shows the system - level simulation has the advantages of high precision and speed.

关 键 词：静电控制 光学开关 系统级建模 交流小信号分析 模态分析 

分 类 号：TG665[金属学及工艺—金属切削加工及机床] TM564.6[电气工程—电器]