亚毫米波大功率脉冲探测器的初步研制  

Preliminary development of submillimeter wave large-power pulse detector

作　　者：王光强[1,2] 王建国[1] 王雪锋[1,2] 李爽[1,2] 曾鹏[1,2] 

机构地区：[1]西北核技术研究所,西安710024 [2]高功率微波技术重点实验室,西安710024

出　　处：《强激光与粒子束》2015年第4期141-145,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金重点项目(61231003)

摘　　要：初步研制了一种用于300~400GHz频段的亚毫米波大功率脉冲探测器。基于强电场下的热电子效应,将n型硅探测芯片置入波导WR10的宽边,构成了探测器的过模探测模块。采用光刻和电镀工艺完成了探测芯片的加工,实现了很好的欧姆接触和尺寸精度。对集成的探测器样机进行了亚毫米波大功率脉冲测试和电压驻波比测量。结果表明：探测器样机的响应时间快达ps量级,相对灵敏度约为0.46kW-1,电压驻波比小于2.4,最大承受功率不小于数十W,与模拟结果符合得较好,满足亚毫米波大功率脉冲的直接探测需求。A submillimeter wave large-power pulse detector for 300-400 GHz frequency band is fabricated and tested.Based on the hot electron effect under high electric field,the overmoded detecting segment of the detector is composed of a waveguide WR10 and an n-type silicon detecting chip placed on the wide waveguide wall.By using lithography and electroplating techniques,the detecting chips are manufactured well with excellent ohmic contact and high dimensional precision.Submillimeter wave largepower pulses is tested and measurement of voltage standing wave ratio（VSWR）is carried out for the detector prototype.Results show that the developed detector has a response time of picoseconds-level,a relative sensitivity of about 0.46kW-1,VSWR less than 2.4,and the maximum enduring power no less than tens of watts,agreeing well with the improved simulation results.So it satisfies the demand of the direct detect of large power pulses at submillimeter wavelength.

关 键 词：亚毫米波 大功率脉冲 过模 驻波比 

分 类 号：TN129[电子电信—物理电子学] O441.5[理学—电磁学]