聚合物MEMS磁扭转微镜电流传感特性研究  

Characteristics of MEMS torsion micro-mirror current sensor based on polymer material

作　　者：王巨锋[1,2] 黄梅红[1,2] 庄琳玲 刘士伟[1,2] 胡奕彬 庄其仁[1,2] 

机构地区：[1]华侨大学信息科学与工程学院,福建厦门361021 [2]泉州师院应用科技学院,福建泉州362000

出　　处：《光电子．激光》2015年第3期450-456,共7页Journal of Optoelectronics·Laser

基　　金：福建省自然科学基金(11151054);福建省光传输与变换重点实验室开放课题(2014101)资助项目

摘　　要：提出一种基于聚合物材料的新型微机电系统(MEMS)交流电传感器,对其关键部件聚合物MEMS磁扭转微镜的特性进行研究。磁扭转微镜基体材料采用聚碳酸酯(PC),扭转梁采用金属材料制作,永磁体内置于扭转微镜中,被聚合物材料所包埋,磁扭转微镜的反射面为反射光栅结构。对扭转微镜的特征参数对扭转力矩和扭转角度的影响进行了分析。结果表明,磁扭转微镜的力矩与通电导线的电流大小成正比,微镜稳态扭转振动时最大扭转角度与导线交流电流(a.c.)幅度成正比;扭转梁长度越长,扭转角幅度越大;而稳态振动扭转角幅度随着扭转梁半径的增大而减小。通过对扭转微镜反射光栅0级衍射光的接收与解调,得到归一化光强测量电流的灵敏度可达0.024/A。A new kind of micro-electro mechanical system（MEMS）current sensor based on polymer material is proposed.The properties of this sensor′s key element polymer MEMS torsion micro-mirror are studied.This torsion micro-mirror has a composite structure,which is constructed by metal and polymer materials.The substrate material of this sensor is polycarbonate（PC）and the torsion beam is made of metal,permanent magnet is built into the base structure and packaged by polymer material.One plane of the torsion micro mirror is designed to be a reflection grating.The working principle of this current sensor is given and the impacts of different feature parameters of this torsion micro-mirror on torque and torsion angle are analyzed.The results show that the torque is proportional to the current magnitude,and the torsion angle amplitude is also proportional to the alternating current（AC）amplitude when the torsion micro-mirror is under steady-state vibration.The torsion angle amplitude becomes larger when the torsion beam is longer,and the torsion angle amplitude decreases when the radius of torsion beam becomes larger.According to the detection and demodulation results of the zero-order diffraction light intensity produced by reflection grating on torsion micro-mirror,the sensitivity of this MEMS current can reach 0.024/A.

关 键 词：聚合物微机电系统(MEMS) 磁扭转微镜 反射光栅 电流传感器 

分 类 号：TN253[电子电信—物理电子学]