基于线阵电荷耦合元件静态光场式时栅位移传感器研究  

Study on the Time-grating Displacement Sensor of the Static Light Field Type Based on Linear Charge-coupled Device

作　　者：付敏[1] 彭东林[1,2] 鲁进[2] 陈锡侯[2] 郑方燕[2] 谢莉[3] 

机构地区：[1]重庆大学机械传动国家重点实验室,重庆400044 [2]重庆理工大学机械检测技术与装备教育部工程中心,重庆400054 [3]湖南人文科技学院信息科学与工程系,娄底417000

出　　处：《机械工程学报》2015年第4期8-14,21,共8页Journal of Mechanical Engineering

基　　金：国家自然科学基金(51127001);国家高技术研究发展计划(863计划;2012AA041202);重庆市'两江学者'计划;重庆市教委科学技术研究(KJ130801);湖南省科技计划(2013GK3109)资助项目

摘　　要：延续前期关于磁场式和电场式时栅位移传感器的研究基础,根据时栅传感器的设计思想,提出并分析光场式时栅传感器的测量原理及实现方案。探索性地提出在静态光场下,用时序驱动的光电探测器构成匀速扫描测量方式,实现将被测对象的空间位移测量转换为时间差的测量。为了验证方案的可行性,用多个线阵电荷耦合元件(Charge-coupled device,CCD)构成圆阵列,实现CCD时栅原理样机设计。将相邻CCD输出信号的时间差变化量与匀速扫描的速度值相乘,经过适当的转换便可得到转轴的角位移大小,并可以判断位移的方向。所研制的原理样机,通过与精度为±1″的圆光栅(ROD880)对比测量,在整周范围内,测量误差控制在±6°以内。为光场式时栅的进一步研究,提供了可靠的理论和实践依据。According to the design ideology of time-grating sensor, continuing with the research foundation of the magnetic field type and electronic field type in the past, a time-grating sensor of light field type is put forward and analyzed. In addition, the principle and implementation plans are proposed. On the basis of measurement principle of time-grating, exploratory presented a method of uniform scanning by using photoelectric detector of timing driven, to convert the displacement detection of the object into measured time difference. To verify the validity of the scheme, a charge-coupled device（CCD） time-grating prototype is designed by a circular array which is constituted by multiple linear CCD of the same type. After multiplied the time difference variation of the output electric signal on the adjacent CCD and the uniform scanning speed value, through proper transformation, size and direction of the relative shaft angular displacement would be got. By measuring compare with circular grating which measurement accuracy reach within ±1 , measuring errors with a developed prototype are controlled within ±1 in the range of entire circumference. A reliable basis of theoretic and practical is provided for the further study on the time-grating of light field type.

关 键 词：光电式传感器 时栅 电荷耦合元件 位移测量 

分 类 号：TH212[机械工程—机械制造及自动化]