晶体硅表面Ag纳米颗粒形貌控制及其对黑硅性能的影响  

Morphology Control of Ag Nanoparticles Deposited on c-Si Surface and Its Influence on the Properties of Black Silicon

作　　者：贾淑婷[1] 王苏尧 韩志达[1] 夏金威 薛丹丹[1] 张磊[1] 

机构地区：[1]常熟理工学院物理与电子工程学院,常熟215500

出　　处：《人工晶体学报》2015年第2期520-524,共5页Journal of Synthetic Crystals

基　　金：国家自然科学基金(51371004);江苏省高校自然科学研究项目(14KJB480001)

摘　　要：采用湿法化学法在太阳能级Si（100）表面沉积Ag纳米颗粒，并对Ag颗粒进行了退火处理。利用扫描电子显微镜研究了不同沉积时间及退火工艺对硅片表面Ag纳米颗粒形貌的影响规律。在此基础上采用退火前后的鲰纳米颗粒辅助化学腐蚀法制备了黑硅减反射结构，并用扫描电子显微镜观察了所制备黑硅的微结构，用紫外．可见分光光度计研究了所制备黑硅的反射率。研究表明，制备的Ag颗粒为不规则片状结构，并且随鲰沉积时间的延长，Ag颗粒逐渐长大。通过对样品退火处理，Ag颗粒收缩成球状纳米颗粒。利用未退火的舷颗粒制备的黑硅呈不规则纳米线状微结构，在300～1100nm范围内平均反射率为2．7％；而利用退火后球状Ag纳米颗粒制备的黑硅则呈多孔状微结构，同样波长范围内平均反射率为14．2％。Ag particles were deposited on the solar-grade Si（100） wafer by wet chemical method. After that, annealing process was carried out. The influence of the deposition time and annealing temperature on the morphology of Ag particles was investigated by scanning electron microscope （SEM）. Black silicon was fabricated by Ag assisted chemical etching method. The microstructure of the black silicon was observed by SEM, and the reflectance spectra were recorded by UV-Vis speetrophotometer. The results show that the as-deposited Ag particles exhibits irregular sheet structure. Ag particles size increases as the deposition time increasing. Through the annealing process, Ag particles shrinked into spherical nanoparticles. The black silicon fabricated from the as-deposited Ag particles shows irregular nanowire structure, and the average reflectance of this kind of black silicon is only 2. 7% in the wavelength range of 300-1100 nm. However, the black silicon fabricated from the annealed Ag nanoparticles illustrates nano-porous microstmcture, and its average reflectance is 14.2% in the same wavelength range.

关 键 词：AG纳米颗粒 黑硅 反射率 太阳能电池 

分 类 号：TB34[一般工业技术—材料科学与工程]