Microfabricated ultra-thin all-polymer thermal ground planes  

超薄高分子材料热管(英文)

作　　者：Ryan Lewis Li-Anne Liew 徐姗姗 李永正 杨荣贵 

机构地区：[1]Department of Mechanical Engineering, University of Colorado

出　　处：《Science Bulletin》2015年第7期701-706,M0003,共7页科学通报（英文版）

基　　金：supported by a grant from the Intelligence Community Postdoctoral Research Fellowship Program through funding from the Office of the Director of National Intelligence;funding from the Defense Advanced Research Projects Agency (DARPA) Thermal Ground Planes project (Grant N6601-08-2006);the State of Colorado Advanced Industries Accelerator program

摘　　要：Abstract Thermal ground planes, or planar heat pipes, can provide highly effective heat transfer by utilizing phase change of an encapsulated fluid. In this article, a flexible thermal ground plane （FTGP） was fabricated using poly- mer materials. Kapton was employed as a casing material while micropatterned SU-8 was used to provide both a liquid wicking structure and pillars to support the casing over a vapor core. An ultra-thin TiO2 film was deposited over the SU-8 and Kapton via atomic layer deposition, which acted as both a moisture barrier and a hydrophilic coating on polymer surfaces. The assembled FTGP has a thickness of 0.30 mm, an active area of 20 mm~ 60 mm, heater area of 20 mm x 10 ram, and can operate with a heat load up to 9.54 W, with an effective thermal con- ductivity up to 541 W/（m K）.热管具有远高于大多数金属的导热性能,已被广泛应用于电子元器件的散热方面.由于电子元器件正朝着微型化、薄型化、片式化和高功率等趋势发展,因此散热元件必须同时具备轻薄和高导热系数的特点.本文介绍了一种由高分子材料制造的超薄热管的设计和制造过程.其厚度为0.30 mm,大小为2 cm×6 cm,输入功率为9.54 W时,有效传热系数为541 W/(m K).管壳材料为kapton薄膜,吸液芯和蒸汽腔均由光阻SU8组成,光阻SU8柱子的大小和柱子之间的间隔差异为吸液芯提供了毛细血力;另外,通过原子层积电镀,SU8光阻和kapton薄膜都覆盖上一层极薄的Ti O2膜,改善了表面和吸液芯的亲水性能,同时实现了密封.

关 键 词：Flexible electronics Heat pipe Electronics cooling - Thermal ground plane 

分 类 号：TB324[一般工业技术—材料科学与工程]