大面积石墨烯薄膜转移技术研究进展  

Advances in Large-Area Graphene Film Transfer Techniques

作　　者：陈牧[1] 颜悦[1] 张晓锋[1] 刘伟明[1] 周辰[1] 郭志强[1] 望咏林[1] 厉蕾[1] 张官理[1] 

机构地区：[1]北京航空材料研究院,北京100095

出　　处：《航空材料学报》2015年第2期1-11,共11页Journal of Aeronautical Materials

摘　　要：化学气相沉积法合成的石墨烯薄膜在实现石墨烯产业化应用过程中,依赖于大面积薄膜转移技术的突破性进展。本文按照中介物过渡转移法、直接干法和湿法转移法、大规模卷对卷转移法分类介绍了现有的30多种石墨烯薄膜转移方法,从微观机理到宏观实现方法对比了三类方法的优缺点和适用范围:中介物过渡转移法主要用于实验室阶段科学探索,转移后的薄膜质量高但尺寸小;直接干法和湿法转移法减少了中介物过渡流程,但仍处于小试阶段;大规模卷对卷转移法借鉴了半导体薄膜工业成熟的卷对卷技术,实现了米级尺寸薄膜的高效和可重复性转移,是目前批量化转移石墨烯薄膜的最有效途径。To realize large-scale applications of graphene films synthesized by chemical vapor deposition, technical breakthrough of transferring large-area graphene films is a prerequisite. This review focuses on recent advances in graphene transfer techniques, which are classified into mediator-assisted transfer, direct dry and wet transfer, mass production roll-to-roll transfer. The requirements and advantages of each class are described and compared from microscopic mechanisms to macroscopic operations. Mediator-assisted trans- fer is mainly used for lab scale exploration, the transferred films are of high quality but possess small sizes. Direct dry and wet transfer reduces the mediator transition process, but is still in bench scale. Mature roll-to-roll technique in semiconductor thin film industry is utilized in mass production roll-to-roll transfer, which realizes high efficient and repeatable pilot scale graphene film transfers. Mass production roll-to-roll is the most effective pathway to realize large-scale graphene film transfer.

关 键 词：石墨烯薄膜 转移技术 目标基片 中介物过渡转移 卷对卷转移 

分 类 号：O613.71[理学—无机化学] TQ127.1[理学—化学]