声表面波压力传感器的仿真与设计  

Simulation and Design of SAW Pressure Sensor

作　　者：向龙[1] 秦廷辉[2] 蒋平英[2] 谢晓[2] 彭锦婕 钱俊江[2] 

机构地区：[1]重庆邮电大学光电工程学院,重庆400065 [2]中国电子科技集团第二十六研究所,重庆400060

出　　处：《压电与声光》2015年第2期201-204,共4页Piezoelectrics & Acoustooptics

基　　金：重庆市科委基金资助项目(cstc2013yykfB40010)

摘　　要：该文设计了一种基于声表面波(SAW)传感原理的无源无线压力传感器。阐述了SAW单端谐振器的原理,对SAW压力传感器的原理进行了分析。选择了基于类似两端固定梁的敏感结构并利用ANSYS软件对其敏感结构进行仿真、分析。利用Mathcad软件对SAW压力传感器进行建模、仿真。并根据仿真结果设计和制作了SAW压力传感器。测试结果表明,制作的传感器灵敏度较高,误差小,具备良好的压力频率特性。A passive and wireless pressure sensor based on SAW has been designed in this work.Firstly,the principle of SAW one-port resonator was presented.Secondly,the principle of SAW pressure sensor was analyzed.The sensitive structure based on similar both ends fixed beam has been chosen and the simulation and analysis of the sensitive structure have been carried out by ANSYS software.SAW pressure sensor has been modeled and simulated by using Mathcad software.The tested results show that the fabricated sensor has the features of high sensitivity,very small errors and good pressure frequency.

关 键 词：声表面波 压力传感器 谐振器 ANSYS MATHCAD 

分 类 号：TN65[电子电信—电路与系统]