压电MEMS超声换能器阵列声场研究  

Research on Sound Field of MEMS Piezoelectric Ultrasonic Transducer Array

作　　者：宋蕊[1] 张明[1] 冯怡斯 

机构地区：[1]中国人民解放军理工大学理学院,江苏南京211101

出　　处：《压电与声光》2015年第2期219-222,共4页Piezoelectrics & Acoustooptics

基　　金：中国人民解放军理工大学预研基金资助项目(20110514);理学院青年科研基金资助项目(KYLYZL001209)

摘　　要：研究了一种基于微电子和微机械加工技术的六边形压电超声换能器阵列。依据活塞声源辐射声场特性,采用瑞利积分法计算了方形膜声压及指向性函数;运用惠更斯原理,仿真模拟了阵列远场声压分布。理论分析了阵元边长、阵元中心间距和阵元数目等结构参数对阵列波束宽度、方向锐度角和旁瓣级的影响。结果表明,该阵列模型不仅能完全消除栅瓣,有效抑制旁瓣,减小主瓣宽度,且在低频(约10kHz量级)范围有很高的指向性。通过优化阵列参数,可获得最佳的声压分布,进而为阵列设计和声场分析提供理论参考。A hexagon ultrasonic transducer array based on MEMS is presented in this paper.According to the radiation sound field of square piston,the sound pressure intensity and directivity formula of individual array element has been calculated using Rayleigh-integration.The amplitude distribution of array has been plotted out by numerical method based on Huygens′s principle.Several factors such as element size,spacing and number that affect the wave width,sharpness angle and sidelobe level are analyzed theoretically.The results show that the proposed hexagon array not only can eliminate the grating lobe,suppress side lobe and reduce the major beam width,but also has a very intensive directivity at low frequency（~10kHz）.The optimization of array parameters can provide guidance for array design and sound field distribution analysis.

关 键 词：压电超声换能器 六边形阵列 远场分析 声压分布 指向性 数值仿真 

分 类 号：TN64[电子电信—电路与系统] TB532[理学—物理]