Polarization-Stable 980 nm Vertical-Cavity Surface-Emitting Lasers with Diamond-Shaped Oxide Aperture  

作　　者：武华 李冲 韩明夫 王文娟 史磊 刘巧莉 刘白 董建 郭霞 

机构地区：[1]Photonic Device Research Laboratory, College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124 [2]College of Physics and Electronic Information, Gannan Normal University, Ganzhou 341000

出　　处：《Chinese Physics Letters》2015年第4期58-61,共4页中国物理快报（英文版）

基　　金：Supported by the National Natural Science Foundation of China under Grant Nos 61222501 and 61335004;the Specialized Research Fund for the Doctoral Program of Higher Education of China under Grant No 20111103110019

摘　　要：Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3 μm diamond-shaped aper- ture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxida- tion of Ⅲ-Ⅴ semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15-55℃ from the threshold to 4 mA.Polarization-stable 980 nm oxide-confined vertical-cavity surface-emitting lasers with 3 μm diamond-shaped aper- ture are fabricated by comprehensively utilizing the anisotropic properties of wet etching and wet nitrogen oxida- tion of Ⅲ-Ⅴ semiconductor materials. Polarization-stable operation along the major axis of the diamond-shaped oxide aperture with 11 dB orthogonal polarization suppression ratio is achieved in a temperature range of 15-55℃ from the threshold to 4 mA.

关 键 词：Polarization-Stable 980 nm Vertical-Cavity Surface-Emitting Lasers with Diamond-Shaped Oxide Aperture VCSEL 

分 类 号：TN248[电子电信—物理电子学]