Fabrication of Metallic Crescent-shaped Nanohole Arrays by Combination of Nanoimprint Lithography and Nanotransfer Printing  

作　　者：GAO Liguo WU Feifei TENG Fei FENG Lei LU Nan 

机构地区：[1]State Key Laboratory of Supramolecular Structure and Materials, Jilin University, Changchun 130012, P. R. China

出　　处：《Chemical Research in Chinese Universities》2015年第2期171-174,共4页高等学校化学研究（英文版）

基　　金：Supported by the National Natural Science Foundation of China（No.21273092） and the National Basic Research Program of China（No.2009CB939701）.

摘　　要：Molecular detection techniques based on localized surface plasmon resonances shift, surfaced-enhanced Raman spectroscopy, surface-enhanced fluorescence, and plasmon resonance energy transfer are all highly dependent on the intensity of localized electromagnetic fields. Many different nano- structures were fabricated for sensing. Ebbesen and his co-workers discovered that hole-based ＂hot spots＂ could act as optical antennae, which could concentrate the electromagnetic fields into extremely small regions. Many efforts have been devoted to understanding this unique transmission phenomenon in the past decade. The most widely used methods for hole array fabrication are e-beam lithography（EBL） and focused ion beam. The serial nature of these techniques allows only small regions to be patterned, and it is difficult to integrate such structures into integrated sensing architecture. To improve the fabrication efficiency, several other methods have been deve- loped. Wu et al. presented a process to fabricate 2D arrays via a self-assembled monolayer of hexagonally close packed silica and polystyrene microspheres. Li et al. reported a technique based on a combination of colloidal lithography and parallel imprinting for fabricating crescent-shaped nanohole structures. Through soft interference lithography, Henzie et al.Molecular detection techniques based on localized surface plasmon resonances shift, surfaced-enhanced Raman spectroscopy, surface-enhanced fluorescence, and plasmon resonance energy transfer are all highly dependent on the intensity of localized electromagnetic fields. Many different nano- structures were fabricated for sensing. Ebbesen and his co-workers discovered that hole-based ＂hot spots＂ could act as optical antennae, which could concentrate the electromagnetic fields into extremely small regions. Many efforts have been devoted to understanding this unique transmission phenomenon in the past decade. The most widely used methods for hole array fabrication are e-beam lithography（EBL） and focused ion beam. The serial nature of these techniques allows only small regions to be patterned, and it is difficult to integrate such structures into integrated sensing architecture. To improve the fabrication efficiency, several other methods have been deve- loped. Wu et al. presented a process to fabricate 2D arrays via a self-assembled monolayer of hexagonally close packed silica and polystyrene microspheres. Li et al. reported a technique based on a combination of colloidal lithography and parallel imprinting for fabricating crescent-shaped nanohole structures. Through soft interference lithography, Henzie et al.

关 键 词：Metallic crescent-shaped nanohole Tilted nanoimprint lithography Nanotranfer printing 

分 类 号：TN305.93[电子电信—物理电子学] TB383[一般工业技术—材料科学与工程]