场致射流微细放电加工实验研究  

Experimental Study of Electrostatic Field-Induced Jet Micro EDM

作　　者：韩宁[1] 张亚欧[1] 赵万生[1] 

机构地区：[1]上海交通大学机械与动力工程学院/机械系统与振动国家重点实验室,上海200240

出　　处：《电加工与模具》2015年第2期4-7,共4页Electromachining & Mould

基　　金：国家自然科学基金资助项目(51175336)

摘　　要：对场致射流微细放电加工单晶硅进行了工艺实验研究,分析在不同加工极性下的加工机理,发现在正极性加工时,蚀坑在工件表面存在电解液残留是由电火花蚀除和电化学蚀除共同作用的结果,而在充分放电的情形下,是由电火花放电来实现材料蚀除的;在负极性加工时,蚀坑仅仅是由电火花蚀除作用的结果。通过单因素实验获取喷管内径、极间距离、极间电压及工作液浓度对单次放电蚀坑直径的影响曲线,通过优化工艺参数在单晶硅表面加工出宽度为1μm、长度为5μm的微细沟槽。研究结果充分证明了场致射流微细放电加工的加工能力。The experiments of electrostatic field-induced jet micro EDM have been carried out. The mechanism of this method under different polarity machining was analyzed. The results showed that during the positive machining craters were formed by electrical discharge process and electrochemical process if electrolyte remained on workpiece,and on the other conditions craters were formed by electrical discharge process. During the negative machining craters were formed only by electrical discharge process. The relationships between crater diameter and factors such as nozzle inner diameter, anode-to-cathode distance,voltage between two polarities and electrolyte concentration were studied respectively in detail. Through optimized parameters micro groove with 5 p,m in length, 1 p,m in width can be machined successfully. The results showed that electrostatic field-induced jet micro EDM is a potential method in micromachining.

关 键 词：场致射流 微细放电加工 单晶硅 

分 类 号：TG661[金属学及工艺—金属切削加工及机床]