残余气体质谱仪的进样输运及其对定量分析的影响  

Sample relaxing in mass spectrometer of residual gas analysis and its effects on quantitative measurement

作　　者：吴聪[1] 刘晓洋[1] 张家良[1] 

机构地区：[1]大连理工大学三束材料改性教育部重点实验室,辽宁大连116024

出　　处：《物理实验》2015年第4期12-17,共6页Physics Experimentation

基　　金：国家自然科学基金资助(No.11375041;10675028);中国科学院化学激光重点实验室开放基金资助(No.20131008)

摘　　要：使用QMS-200残余气体质谱分析仪,分别以空气、空气/氩气混合气体为样品,研究了质谱仪的进样输运效应.利用空气/氩气混合气体作为标准样品,进行了质谱峰强对浓度的标定,获得了分析仪对残余空气定量分析的标定关系.研究发现:由于输运过程,注入样品由于不同成分的输运速率、排空速率不同,样品不同成分在质谱仪内的量与其原始物质的量有所不同.A QMS-200 mass spectrometry（MS）residual gas analyzer was chosen to investigate the sample relaxing process after injection.Synthetic air and air/Ar mixtures with certain ratios served as standard samples for the investigation.It was shown that MS intensities of the components did not represent the mole concentrations,because the relaxation speeds of the components were different from each other due to their different transportation and evacuation rates.For quantitative composition analysis using the analyzer,routine calibration was needed.By preparing air/Ar mixtures with different mole ratios as standard samples,the relative MS intensities of the components were found proportional to the mole ratios and therefore could be scaled for quantitative analysis.

关 键 词：残余气体分析仪 输运效应 质谱峰强 

分 类 号：O657.63[理学—分析化学]