ITO透明导电膜的湿法制备与性能研究  

Preparation of ITO transparent conductive films with wet process and performance investigation

作　　者：杨鑫[1] 李小丽[1] 王虹[1] 

机构地区：[1]天津大学化工学院绿色合成与转化教育部重点实验室,天津300072

出　　处：《化工新型材料》2015年第4期76-78,85,共4页New Chemical Materials

基　　金：国家科技计划项目(2012BAF13B05)

摘　　要：以聚乙烯基吡咯烷酮为分散剂制备了氧化铟锡(ITO)溶胶,通过涂布的方式将其制备成ITO透明导电膜,考察了不同热处理温度及表面粗糙度对ITO薄膜性能的影响。结果表明:ITO溶胶颗粒粒度分布较窄,分散性好;随着热处理温度的升高,ITO薄膜的导电性和透光性均逐渐增强;相同热处理温度下,薄膜表面粗糙度越低越有利于获得低电阻率、高透光率的ITO薄膜。Indium tin oxide （ITO） transparent conductive films were prepared first by coating ITO sol which was obtained by dispersing ITO nanoparticles in solvent in the presence of polyvinylpyrrolidone. Then the influences of different heating temperatures and surface roughness on the properties of films were investigated. Results showed that the sol had a narrow particle size distribution,which certificated the good dispersion of the particles. With the increase of heat-treatment temperature, the conductivity and transmittance of films were improved gradually and low surface roughness was benefit for both reducing resistivity and enhancing transmittance of films.

关 键 词：ITO透明导电膜 湿法 表面粗糙度 导电性 透光性 

分 类 号：TQ134.32[化学工程—无机化工] TB383.2[一般工业技术—材料科学与工程]