基于不同衬底的二氧化硅可调复用器/解复用器的单片集成芯片研究  

Monolithic Integration of Silica VMUX/DEMUX Based on Different Substrates

作　　者：代红庆[1] 安俊明[1] 王玥[1] 张家顺[1] 王亮亮[1] 王红杰[1] 李建光[1] 吴远大[1] 钟飞 查强 

机构地区：[1]中国科学院半导体研究所集成光电子国家重点实验室,北京100083 [2]河南仕佳光子科技有限公司,河南鹤壁458030

出　　处：《半导体光电》2015年第1期16-19,23,共5页Semiconductor Optoelectronics

基　　金：国家"863"计划项目(2013AA031402;2011AA010303);国家自然科学基金项目(61274047;61090390;61275029;61205044;61307034);河南省自主创新基金;河南省重大科技专项项目

摘　　要：分别设计制备了基于石英衬底和硅衬底的16通道200GHz二氧化硅可调复用器/解复用器。该器件由一个16通道200GHz的阵列波导光栅(AWG)和Mach-Zehnder干涉型热光可调光衰减器(VOA)阵列构成。在衰减量达到20dB的时候,基于石英衬底的器件的外加偏压和功耗分别是11.7V和110mW;而基于硅衬底的器件的外加偏压和功耗分别是22V和380mW。分析了基于不同衬底的器件性能出现差别的原因,并设计了新的结构,提高了器件性能。A 16-channel 200 GHz silica variable optical attenuator multiplexer/demultiplexer （VMUX/DEMUX） based on quartz and silicon substrates are designed, respectively. The proposed VMUX/DEMUX consists of a 16-channel 200 GHz arrayed waveguide grating （AWG） and an array of Mach-Zehnder interferometer （MZI） thermo-optic variable optical attenuators （VOAs）. At the attenuation of 20 dB, the voltage applied and power consumption of the device based on quartz substrate is 11. 7 V and 110 mW, which is better than the presently known results; however, the voltage and power consumption of the device based on silicon substrate is 22 V and 380 mW. Then the performance differences of the devices based on different substrates were analyzed. Lastly, a new structure is developed so as to improve the device performance.

关 键 词：可调复用器/解复用器 石英衬底和硅衬底 阵列波导光栅 热光可调光衰减器 

分 类 号：TN256[电子电信—物理电子学]