磨粒粒径对固结磨料研磨石英玻璃的加工性能影响  

Effect of abrasive sizes on lapping performance of fixed abrasive pad when machining quartz glass

作　　者：王文泽[1] 李军[1] 夏磊[1] 王慧敏[1] 朱永伟[1] 左敦稳[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016

出　　处：《金刚石与磨料磨具工程》2015年第2期9-13,20,共6页Diamond & Abrasives Engineering

基　　金：国家自然科学基金资助项目(51175260);中国博士后科学基金资助项目(2014M551586);江苏省博士后科研资助计划(1302069B);中央高校基本科研业务专项资金资助项目(NS2013055);江苏省高校优势学科建设工程资助

摘　　要：固结磨料研磨垫的磨粒粒径是影响其加工效率和表面质量,以及下阶段抛光过程的重要因素。使用5μm、14μm和30μm三种粒径的金刚石固结磨料研磨垫加工石英玻璃,分析磨粒粒径对工件表面质量、材料去除率、声发射信号、摩擦系数和磨屑的影响,并结合磨粒切深选择最佳磨粒粒径。结果表明:随着磨粒粒径增大,材料去除率和表面粗糙度值均增大,声发射信号的均值和振幅显著提高,摩擦系数到达稳定水平需要的时间延长。14μm粒径磨粒的切深分布接近石英玻璃的脆塑转变临界切深201.2nm。选用粒径14μm的金刚石固结磨料研磨垫加工石英玻璃,其材料去除率为5.65μm/min,石英玻璃的表面粗糙度值Ra为66.8nm,满足硬脆材料的高效、高质量研磨要求。Particle size of fixed abrasive lapping is an important factor which influences the process efficiency, surface quality and even subsequent polishing process. Three diamond fixed abrasive pads （FAP） with different particle size, namely 5 μm, 14μm and 30 μm, were used to lap quartz glass. Surface quality, material removal rate （MRR）, acoustic emission signal, coefficient of friction （COF） and wear debris were investigated. Combined with abrasive cutting analysis, the optimal particle size was selected. The results showed that with the increase of particle size, MRR and R a increased and the mean and amplitude of the acoustic emission signal magnified significantly, while the time required to reach a stable COF level rose. The cutting depth distribution of 14 μm diamond FAP came close to 201.2 nm, critical depth of brittle-ductile transition of quartz glass. Lapping quartz glass with 14μm diamond FAP could meet the requirements of high efficient and high quality for hard and brittle material. The MRR was 5.65 μm/min with Ra 66.8 nm.

关 键 词：石英玻璃 固结磨料研磨 材料去除率 表面粗糙度 磨粒切深 

分 类 号：TH140[一般工业技术—材料科学与工程] TG74[机械工程—机械制造及自动化]