太阳电池工艺中链式扩散与管式扩散对比研究  

COMPARISON INVESTIGATION OF CHAIN DIFFUSION TO TUBE DIFFUSION OF SOLAR CELLS PROCESS

作　　者：王星谕 蔡昭 张光春 李果华[1,3] 

机构地区：[1]江南大学理学院,无锡214122 [2]无锡尚德太阳能电力有限公司,无锡214028 [3]江苏省(尚德)光伏技术研究院,无锡214028

出　　处：《太阳能学报》2015年第4期855-859,共5页Acta Energiae Solaris Sinica

摘　　要：简要介绍链式和管式扩散的基本原理,并通过实验,给出扩散后硅片表面磷浓度、pn结结深、方阻不均匀度和电池片电性能等方面的对比分析,验证相比于管式扩散,链式扩散所具有的优劣势。链式扩散在拥有提高产量、降低生产成本和减少环境污染的优势条件下,虽然开路电压略有降低,但电池片光电转换效率仍能和采用传统管式扩散工艺制备的电池片相持平,技术水平已适用于大规模产业化生产。In abroad, the chain diffusion furnace has been studied, developed and used for many years in abroad. However its domestic development is very slow. This paper. The basic principles of chain diffusion and tube diffusion wrer briefly described. Through experiments, the comparison analyses of phosphorus concentration on silicon surface after the diffusion, p4a junction depth, thenon-uniformity of sheet resistance and electrical performance of chain cell were prorided. The results show the advantages and disadvantages of chain diffusion compared to those of tube diffusion. The chain diffusion can increase yield, reduce production cost and reduce the pollution to the environment. Although the open circuit voltage of solar cell in chain proless is slightly lower, the conversion efficiency of solar cells is consistent with solar cells by traditional tube diffusion process. The technology level of chain diffusion is able to suitable for large- scale industrial production.

关 键 词：太阳电池 链式扩散 磷酸 电化学电容-电压法(ECV) 

分 类 号：TM914.4[电气工程—电力电子与电力传动]