锰钴镍氧浸没式探测器制备及性能  

Fabrication and performance of Mn-Co-Ni-O thin film infrared detector

作　　者：周炜[1,2] 欧阳程[1] 吴敬[1] 高艳卿[1] 黄志明[1,2] 

机构地区：[1]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083 [2]中国科学院空间主动光电重点实验室,上海200083

出　　处：《红外与毫米波学报》2015年第2期161-165,共5页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(11204336;61274138;61275111;11304336);上海市基金(12ZR1452200);上海技术物理所创新专项(Q-ZY-86)~~

摘　　要：基于化学溶液法制备了尖晶石结构氧化物锰钴镍氧Mn1.56Co0.96Ni0.48O4（MCNO）薄膜材料,研究了其电学性质及红外器件的探测性能,包括器件的响应率,时间常数和探测率.制作了厚度为8μm的MCNO薄膜及红外热敏探测器件,测量了材料的阻值-温度曲线.制作了基于半球形锗透镜的浸没式MCNO薄膜探测器,具有时间常数较小（~18 ms）,响应率高（~4.4×103V/W）和探测率高（~5×108cm·Hz0.5/W）的优点.Spinel oxide Mn-Co-Ni-O （MCNO） thin films were prepared by using a chemical solution deposition method （CSD）. The electrical property and device performance based on MCNO thin films were investigated, including the re- sponsivity （Rv）, noise spectra and the detectivity （D ＊ ）. MCNO thin film with a thickness of 8 μm was prepared and their sheet resistance versus temperature curves are measured. The optical immersed MCNO infrared detector based on Germanium lens was fabricated, and it possesses the advantages of relatively small time constant （ ~ 18 ms）, high re- sponsivity （ -4.4 × 103 V/W） and high detectivity （ -5 × 10s cm · Hz0.5/W）.

关 键 词：尖晶石氧化物 薄膜 热敏探测器 浸没式 

分 类 号：TN21[电子电信—物理电子学]