微细超声工作台的设计与微振幅测量  

Design of micro ultrasonic worktable and measurement of its micro amplitude

作　　者：连海山[1] 郭钟宁[1] 张伟[1] 何俊峰[1] 韩睿聪 

机构地区：[1]广东工业大学机电工程学院,广州510006

出　　处：《振动与冲击》2015年第7期199-203,共5页Journal of Vibration and Shock

基　　金：国家自然科学基金重点资助项目(U1134003);国家自然科学基金(51175091)

摘　　要：微细超声工作台是微细超声加工机床与微细超声振动辅助加工机床的关键零部件,其振幅值直接影响加工精度与加工效率。传统的振幅测量方法很难准确的测出微细超声工作台的微振幅。基于精密微三维运动平台的高分辨率,提出了一种恒力控制的微振幅测量方法,成功的测量出能精确到0.1μm的微振幅。首先对微细超声工作台中的微细超声振动系统进行了理论设计,然后采用基于恒力控制的超声振幅测量方法,对不同功率作用下的微细超声振动系统的振幅值进行了测量。The micro ultrasonic worktable is the key component of the machining tools for micro ultrasonic machining and micro ultrasonic vibration assisted machining significant effect on the machining precision and processing ~ The vibration amplitude of the micro ultrasonic worktable has efficiency. The traditional vibration measurement methods can hardly measure the micro amplitude of the micro ultrasonic worktable precisely~ Based on the high resolution demand of the precise micro three-dimensional motion worktable, a micro amplitude measurement method controlled by constant force was presented and the micro amplitude of 0.1 i.~m precision has been measured successfully. The theoretical design of the micro ultrasonic vibration system in the micro ultrasonic worktable was carried out in the first section of the paper. In the second section, amplitudes of the micro ultrasonic vibration system with different power were measured by the proposed method.

关 键 词：微细超声工作台 微细超声加工 微振幅 设计 测量 

分 类 号：TB534.2[理学—物理]