同步移相干涉仪中的延迟阵列移相特性研究  

Research on Phase-Shifting Characteristic of Retarder Array in Simultaneous Phase-Shifting Interferometer

作　　者：郑东晖[1] 陈磊[1] 李博[2] 李金鹏[1] 乌兰图雅[1] 

机构地区：[1]南京理工大学电光学院,江苏南京210094 [2]中国科学院国家天文台南京天文光学技术研究所,江苏南京210042

出　　处：《光学学报》2015年第4期187-193,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61108041;U1231111)

摘　　要：为了研究同步移相干涉仪中延迟阵列的移相特性,采用琼斯矢量和琼斯矩阵作为偏振光和偏振光传递的参量和模型,分析推导了延迟阵列的移相量与快轴方位角误差之间的传递关系,给出了误差传递函数公式,在没有精确校准延迟阵列快轴方位角的情况下,搭建了基于延迟阵列移相的测量装置,利用该装置和Zygo GPI XP型干涉仪测量同一块球面镜,测量波面均方根值相差0.003λ,峰谷值相差0.033λ。讨论了延迟阵列方位角误差容限和延迟量误差、偏振片透光轴方位角误差对测量结果的影响。To study the phase- shifting characteristic of retarder array in simultaneous phase- shifting interferometry, the relationship between phase shift and fast-axis azimuth error is deduced through Jones vector and Jones matrix, and the error propagation formula is given. A spherical mirror is measured by simultaneous phaseshifting interferometer based on retarder array without calibrating fast-axis azimuth accurately and Zygo GPI XP interferometer, the difference of root-mean-square and peak-to-valley are 0.003 l and 0.033 l respectively. The influence of azimuth error tolerance and phase shift error of retarder array and optical axis azimuth error of polarizer is discussed.

关 键 词：测量 光学测量 干涉 同步移相 延迟阵列 

分 类 号：O436[机械工程—光学工程]