飞秒激光在掺Er^(3+)“无水”氟碲酸盐玻璃中写入光波导  

Er^(3+):‘Water-free’ Fluorotellurite Glass Waveguides Written by Femtosecond Laser

作　　者：刘爽[1,2] 唐文龙[1,2] 程光华[1] 

机构地区：[1]中国科学院西安光学精密机械研究所瞬态光学与光子技术国家重点实验室,陕西西安710119 [2]中国科学院大学,北京100049

出　　处：《光学学报》2015年第4期194-200,共7页Acta Optica Sinica

基　　金：国家自然科学基金(61223007;61378019)

摘　　要：利用重复频率为1 k Hz,中心波长为800 nm,脉冲宽度为120 fs的超短脉冲激光在掺Er3+"无水"氟碲酸盐玻璃中利用狭缝整形技术横向刻写了I类和压低圆包层波导。在对波导刻写参数进行系统研究后,得到了两组导光模式较优的波导。利用波导的近场模式强度分布重构了其折射率分布图,得到两类波导最大的折射率增加量分别为1×10-4和1.9×10-4。用散射法测试了I类波导的传输损耗为1.04 d B/cm;通过测量插入损耗得到压低圆包层波导的传输损耗小于1.88 d B/cm。因此,利用飞秒激光在掺Er3+"无水"氟碲酸盐玻璃中刻写的光波导,在集成激光光源制作方面具有很好的应用前景。By femtosecond laser with repetition rate of 1 kHz, central wavelength of 800 nm and pulse width of120 fs, Type I（single line） and depressed circular cladding waveguides in Er^3＋ doped‘water-free＇fluorotellurite glass are transversely written with slit shaping technology, respectively. The impact of the processing conditions on the waveguides′ formation is systematically studied, and the waveguides with better guiding mode are obtained.Refractive index profile is reconstructed by intensity distribution of the near-field mode, and the largest positive refractive index change for Type I waveguide is about 1×10^-4, slightly smaller than that（1.9×10^-4） of depressed cladding waveguide. By using the scattering technique, the propagation loss of Type I waveguide is about 1.04 dB/cm.The loss of depressed cladding waveguide is less than 1.88 dB/cm by measuring insertion loss. Therefore, Er^3＋ doped‘water-free＇fluorotellurite glass waveguides inscribed by femtosecond laser are promising candidates for the development of integrated laser resources.

关 键 词：集成光学 光波导 飞秒光刻 狭缝整形 掺Er^3+“无水”氟碲酸盐玻璃 

分 类 号：TN249[电子电信—物理电子学] TN25