以BCl_3-CH_4-H_2为前驱体、化学气相沉积制备B_xC凝聚相产物的热力学研究（英文）  

Thermodynamics of Preparing B_xC Condensed Phases by CVD Using BCl_3-CH_4-H_2 as Precursors

作　　者：孙国栋[1,2,3] 邓娟利[1,2] 李辉[1,2] 张青[3] 

机构地区：[1]长安大学,陕西西安710064 [2]西北工业大学凝固技术国家重点实验室,陕西西安710072 [3]西北工业大学超高温结构复合材料重点实验室,陕西西安710072

出　　处：《稀有金属材料与工程》2015年第4期826-829,共4页Rare Metal Materials and Engineering

基　　金：National Natural Science Foundation of China(51402024,51402023);The State Key Laboratory of Solidification Processing Funding in Northwestern Polytechnical University(NWPU)(SKLSP201224,SKLSP201317,SKLSP201211);The Special Funding for Fundamental Scientific Research of Central Colleges of Chang’an University(CHD2011JC145,2013G3314001)

摘　　要：采用完整热力学平衡分析验证了自愈合相BxC的产物是温度和初始气体摩尔比的函数。结果表明,凝聚相的成分与温度和气体的摩尔比（如BCl3：（BCl3＋CH4）、H2：（BCl3＋CH4））密切相关。BxC的理想沉积条件是：BCl3：（BCl3＋CH4）之比为0.8,H2：（BCl3＋CH4）之比在10-105.2之间,而温度应高于950 K。材料的富碳或者富硼主要通过调整BCl3：（BCl3＋CH4）和H2：（BCl3＋CH4）的气体摩尔比来控制。The products of self-healing phase BxC were examined as a function of temperature and initial gas molar ratios of BC13：（BC13＋CIJu） and H2：（BCI3＋CH4） by complete thermodynamic equilibrium analysis. The results show that the composition of the condensed phase is quite sensitive to temperature and the molar ratios of BC13：（BC13＋CH4） and H2：（BC13＋CH4）, Based on our calculation, the ideal conditions for BxC deposition are as follows： the ratio of BC13：（BC13＋CH4） is 0.8, the ratio of H2：（BCI3＋CH4） ranges from 10 to 10^5.2, and the temperattn＇e is above 950 K. We found that the carbon-richment or boron-richment in materials are mainly adjusted by the ratios of BC13：（BCh＋CH4） and H2：（BC13＋CH4）,

关 键 词：热力学 化学气相沉积 凝聚相 

分 类 号：O613.81[理学—无机化学]