纳米金刚石膜的成核及生长特性研究  

Nucleation and growth characteristics of nanocrystalline diamond films

作　　者：钱莉荣[1] 戴玮[1] 李翠平[2] 徐晟[1] 杨保和[1,2] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津理工大学电子信息工程学院天津市薄膜电子与通信器件重点实验室,天津300384

出　　处：《光电子．激光》2015年第4期700-706,共7页Journal of Optoelectronics·Laser

基　　金：国家高技术研究发展计划(863)(2013AA030801);国家自然科学基金(61401306;61301045);天津市自然科学基金(13JCZDJC36000)资助项目

摘　　要：采用直流等离子体喷射化学气相沉积（DC arc plasma jet）系统制备了纳米金刚石膜（NCD）,研究了不同的金刚石成核剂溶液对NCD膜的成核及生长的影响。研究表明,在成核剂溶液中添加二甲基亚砜（DMSO）后成核密度明显得到提高,而且制备的NCD膜晶粒分布均匀、致密。当金刚石粉体作为成核剂时,随着其粒径的增大,NCD膜成核密度下降,晶粒的尺寸均匀性也变差,而粒径为5nm的金刚石纳米粒子作为成核剂时,NCD膜晶粒间结合致密、颗粒分布均匀。最后,选择5nm的金刚石纳米粒子和丙酮/DMSO配制的分散液作为成核剂配方,经过60min的生长,制备了粒径为50~70nm的结晶性和品质良好的NCD膜,适用于高频声表面波（SAW）器件及各种光学窗口的研制。In this study,the nanocrystalline diamond （NCD） films were prepared by a DC arc plasma jet chemical vapor deposition （CVD） system. Nucleation and growth of the NCD films highly depend on the pretreatment process for substrates. The effects of diamond particles in different solvent systems on the nucleation of nanocrystalline diamond films are analyzed. The nucleation density of the NCD films de- creases with the increasing size of the diamond particles in the solvent systems. The solvent system con- tains dimethyl sulfoxide （DMSO） and using it to pretreat substrates can enhance nucleation density,and crystal nucleus becomes smaller and more intense. Finally, the NCD films were grown for 60 min after pretreatment in a mixed solution of acetone and dimethyl sulfoxide containing 5 nm diamond nanoparti- cles. The films consist of diamond nanocrystals with 50--70 nm diameter,and with good crystalline qual- ity. The NCD films are suitable for the high-frequency surface acoustic wave devices and various optical windows.

关 键 词：纳米金刚石(NCD)膜 二甲基亚砜(DMSO) 纳米金刚石粉体 分散性 成核密度 

分 类 号：TN65[电子电信—电路与系统]