流式细胞仪中压电扫描振镜的设计  

Design of Piezoelectric Optical Scanner in Flow Cytometer

作　　者：马玉婷[1,2] 钟金凤[1,2] 王策[1,2] 严心涛[1,2] 

机构地区：[1]中国科学院苏州生物医学工程技术研究所,苏州215163 [2]中国科学院生物医学检验技术重点实验室,苏州215163

出　　处：《纳米技术与精密工程》2015年第3期186-192,共7页Nanotechnology and Precision Engineering

基　　金：国家高技术研究发展计划(863计划)资助项目(2011AA02A106);苏州市应用基础研究计划资助项目(SYG201423;SYG201207)

摘　　要：针对流式细胞成像的应用需求,设计了一维压电扫描振镜并进行了性能测试.该振镜利用微铰链梁将压电片的伸缩振动转化为反射面的旋转振动.首先,通过有限元仿真对压电振镜进行结构建模和性能分析,得到了振镜的工作模态以及扫描频率和最大扫描角度随结构尺寸的变化关系.接着,制备了由压电片和硅片基底组成的振镜样机.最后,利用角度测量系统对振镜的扫描特性和频响特性进行了测试.实验结果表明:2 mm×2 mm的反射面在12Vpp的电压驱动下可在谐振频率10.034 k Hz处产生14°的扫描角度,在5.2Vpp的电压驱动21.26 k Hz的高频谐振下,仍可以产生3.35°的扫描角度.振镜样机Q值达865,扫描角度与驱动电压幅值呈线性关系.该振镜具有较大的镜面尺寸和较高的扫描频率,可满足流式细胞扫描成像快速和高分辨率的应用需求.Regarding the application requirements of imaging in flow cytometer, a one-dimensional piezo- electric optical scanner was designed and tested. It converts the stretching oscillations of the piezoelectric sheet into the resonant rotary vibration of scanning mirror, applying micro hinges. Firstly, the working modes were obtained and the influence of structural dimensions on resonant frequencies and maximum scanning angles were investigated by structure modeling and performance analysis with finite element sim- ulation. Secondly, a prototype scanner was fabricated with piezoelectric sheet and silicon substrate. Fi- nally, the scanning angles and frequency responses of the prototype were tested using angle measurement system. Experimental results show that with a 2 mm ×2 mm square mirror, a scanning angle of 14°can be achieved at resonant frequency of 10. 034 kHz with driving voltage of 12Vpp and the scanner can still produce a scanning angle of 3.35° at high frequency of 21.26 kHz with driving voltage of 5.2Vpp. The prototype presents a high Q value of 865 and the scanning angles change linearly with driving voltage am- plitude. The scanner has a large mirror size and high scanning frequency, which can meet the require- ments of rapid and high resolution imaging in flow cytometer.

关 键 词：压电扫描振镜 光学扫描 谐振 有限元仿真 

分 类 号：TH77[机械工程—仪器科学与技术]