周期铁电畴压电陶瓷的制备工艺和频谱特性  

Studies on preparation and spectrum properties of piezoelectric ceramics with periodic ferroelectric domains

作　　者：屈绍波[1] 曹国雄[1] 张孟[1] 傅振堂[1] 王斌科[1] 薛金林[1] 

机构地区：[1]空军工程大学理学院,陕西省西安市710051

出　　处：《功能材料信息》2015年第2期12-16,共5页Functional Materials Information

摘　　要：采用了半导体光刻工艺、压电陶瓷极化工艺相结合的方法制备了多晶压电陶瓷周期畴结构。设计了周期极化所用高电压的脉冲波形、脉冲极化电压、脉冲宽度和脉冲个数。通过频谱分析可以得知:周期铁电畴压电陶瓷厚度切变振动的谐振频率决定于压电陶瓷周期铁电畴的半周期厚度,而不是决定于压电陶瓷的总厚度。周期铁电畴压电陶瓷厚度切变振动的谐振频率相应得到了提高,并且在其附近的Cs值达到了负值。Multi-crystal piezoelectric ceramics with periodic ferroelectric domains were prepared adopting the technics of semiconductor light carving and piezoelectric ceramics poling; Pulse wave shape, pulse poling voltage, pulse width and pulse numbers were designed. The results of spectrumanalyses show that the thickness shear resonance frequency is dependent on the half periodical thickness of periodical ferroelectric domains rather than the total thickness and that the thickness shear resonance frequency of piezoelectric ceramics with periodic ferroelectric domains were improved correspondingly, and Cs became negative near the thickness shear resonance frequency.

关 键 词：周期畴反转 频谱 周期铁电畴结构 极化 

分 类 号：TM282[一般工业技术—材料科学与工程]