矩阵磁场作用下磁性液体薄膜的微形变  

Micro Patterning of the Magnetic Fluid Film Under the Matrix Magnetic Field

作　　者：刘同冈[1] 费菲[1] 郭岩[1] 刘帅[1] 尹浩[1] 

机构地区：[1]中国矿业大学机电工程学院,江苏徐州221116

出　　处：《微纳电子技术》2015年第5期278-282,288,共6页Micronanoelectronic Technology

基　　金：江苏省自然科学基金资助项目(BK20131114);中央高校基本科研业务费专项资金资助项目(2012QNA32)

摘　　要：在对磁场作用下磁性液体薄膜微形变的影响因素进行分析的基础上,设计了一套磁性液体薄膜微形变测试装置,利用永磁体与电磁线圈相结合作为磁源实现了矩阵磁场的微型化和形变所需梯度,借助摄像装置观测记录磁性液体薄膜微形变的实时图形。通过ANSYS软件仿真分析确定了矩阵磁场的最佳磁源距离,实验研究了矩阵磁场的磁极布置方式、磁性液体的量对其薄膜微形变图形的影响。实验结果表明：对于4×4的矩阵磁场,当磁源相距3.5-4mm、磁极同侧相邻同极布置、磁性液体体积为0.6mL时,磁性液体薄膜的微形变凸起高度达到最大,凸起点大小均匀,形状圆润,形变效果最好。测试结果验证了磁性液体薄膜微形变的磁场可控性,为微镜阵列的致动方式提供了一个新的研究方向。A set of the test signed based on the analysi apparatus for the micro patterning of s of the affecting factors for the micro the magnetic fluid film was depatterning of the magnetic fluid film under the magnetic field. The required gradient of the magnetic field for miniaturizing and patterning the matrix magnetic field was obtained by combining the permanent magnets with the electromagnetic coils as the magnetic source. Besides, the patterning images of the magnetic fluid in real time were observed and recorded by the image pickup device. Then the matrix magnetic field was simulated and analyzed by ANSYS to determine the optimal magnetic source distance between the matrix magnetic fields. The experimental tests were finally conducted to analyze the effect of the magnetic pole distribution method and the volume of the magnetic fluid on the micro patterning image. The experimental results show that for the 4 × 4 matrix magnetic field, when the homopolar field magnetic sources are arranged in the distance of about 3.5 mm to 4 mm and the volume of magnetic fluid is 0.6 mL, the micro patterning of the magnetic fluid film have maximum height, uniform convex points, rounded patterning and best effects. The test results obtained verify that the micro patterning of the magnetic fluid film can be controlled by the magnetic field, providing a new research direction of the actuation for the micro mirror array.

关 键 词：微镜 磁性液体 薄膜 矩阵磁场 微形变 

分 类 号：TB43[一般工业技术] TB383